Abstract
Piezoresponse force microscopy (PFM) is a powerful method widely used for nanoscale studies of the electromechanical coupling effect in various materials systems. Here, we review recent progress in this field that demonstrates great potential of PFM for the investigation of static and dynamic properties of ferroelectric domains, nanofabrication and lithography, local functional control, and structural imaging in a variety of inorganic and organic materials, including piezoelectrics, semiconductors, polymers, biomolecules, and biological systems. Future pathways for PFM application in high-density data storage, nanofabrication, and spectroscopy are discussed.
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References
M. Alexe, A. Gruverman, Eds., Ferroelectrics at Nanoscale: Scanning Probe Microscopy Approach (Springer, New York, 2004).
A. Grigoriev, D.H. Do, D.M. Kim, C.B. Eom, B. Adams, E.M. Dufresne, P.G. Evans, Phys. Rev. Lett. 96, 187601 (2006).
T. Nattermann, Y. Shapir, I. Vilfan, Phys. Rev. B 42, 8577 (1990).
A. Agronin, M. Molotskii, Y. Rosenwaks, G. Rosenman, B.J. Rodriguez, A.I. Kingon, A. Gruverman, J. Appl. Phys. 99, 104102 (2006).
T. Tybell, P. Paruch, T. Giamarchi, J.-M. Triscone, Phys. Rev. Lett. 89, 097601 (2002).
N.A. Pertsev, A Petraru, H. Kohlstedt, R. Waser, I.K. Bdikin, D.A. Kiselev, A.L. Kholkin, Nanotechnology 19, 375703 (2008).
P. Paruch, T. Giamarchi, J.-M. Triscone, Phys. Rev. Lett. 94, 197601 (2005).
G. Catalan, H. Béa, S. Fusil, M. Bibes, P. Paruch, A. Barthélémy, J.F. Scott, Phys. Rev. Lett. 100, 027602 (2008).
V. Likodimos, M. Labardi, X.K. Orlik, L. Pardi, M. Allegrini, S. Emonin, O. Marti, Phys. Rev. B 63, 064104 (2001).
V. Likodimos, M. Labardi, M. Allegrini, Phys. Rev. B 66, 024104 (2002).
V.V. Shvartsman, A.L. Kholkin, J. Appl. Phys. 101, 064108 (2007).
D.J. Kim, J.Y. Jo, T.H. Kim, S.M. Yang, B. Chen, Y.S. Kim, T.W. Noh, Appl. Phys. Lett. 91, 132903 (2007).
A. Gruverman, B.J. Rodriguez, C. Dehoff, J.D. Waldrep, A.I. Kingon, R.J. Nemanich, J.S. Cross, Appl. Phys. Lett. 87, 082902 (2005).
A. Gruverman, D. Wu, J.F. Scott, Phys. Rev. Lett. 100, 097601 (2008).
J.Y. Jo, H.S. Han, J.-G. Yoon, T.K. Song, S.-H. Kim, T.W. Noh, Phys. Rev. Lett. 99, 267602 (2007).
A. Gruverman, D. Wu, H.-J. Fan, I. Vrejoiu, M. Alexe, R.J. Harrison, J.F. Scott, J. Phys.: Condens. Matter 20, 342201 (2008).
B.J. Rodriguez, X.S. Gao, L.F. Liu, W. Lee, I.I. Naumov, A.M. Bratkovsky, D. Hesse, M. Alexe, Nano Lett. 9, 1127 (2009).
M. Dawber, A. Gruverman, J.F. Scott, J. Physics: Condens. Matter 18, L71 (2006).
G.A. Smolenskii, V.A. Isupov, Dokl. Akad. Nauk SSSR 9, 653 (1954).
L.E. Cross, Ferroelectrics 76, 241 (1987).
S.-E. Park, T.R. Shrout, J. Appl. Phys. 82, 1804 (1987).
H.H. Haertling, Ferroelectrics 75, 25 (1987).
S.B. Vakhrushev, O.E. Kvyatkovksy, A.A. Naberezhnov, N.M. Okuneva, B. Toperverg, Ferroelectrics 90, 173 (1989).
P. Lehnen, W. Kleemann, Th. Woike, R. Pankrath, Phys. Rev. B 64, 224109 (2001).
V.V. Shvartsman, W. Kleemann, T. Lukasiewicz, J. Dec, Phys. Rev. B 77, 054105 (2008).
W. Kleemann, J. Dec, V. V. Shvartsman, Z. Kutnjak, T. Braun, Phys. Rev. Lett. 97, 065702 (2006).
G. Xu, D. Viehland, J.-F. Li, P.M. Gehring, G. Shirane, Phys. Rev. B 68, 212410 (2003).
S.B. Vakhrushev, A.A. Naberezhnov, B. Dkhil, J.-M. Kiat, V. Shvartsman, A. Kholkin, B. Dorner, A. Ivanov, AIP Conf. Proc. 677, 74 (2003).
V. V. Shvartsman, A.L. Kholkin, Phys. Rev. B 69, 014102 (2004).
F. Bai, J.-F. Li, D. Viehland, Appl. Phys. Lett. 85, 2313 (2004).
I.K. Bdikin, V. V. Shvartsman, A.L. Kholkin, Appl. Phys. Lett. 83, 4232 (2003).
V. V. Shvartsman, A.L. Kholkin, A. Orlova, D. Kiselev, A.A. Bogomolov, A. Sternberg, Appl. Phys. Lett. 86, 202907 (2005).
D.A. Kiselev, I.K. Bdikin, E.K. Selezneva, K. Bormanis, A. Sternberg, A.L. Kholkin, J. Phys. D 40, 7109 (2007).
V.V. Shvartsman, A. Yu. Emelyanov, A.L. Kholkin, A. Safari, Appl. Phys. Lett. 81, 117 (2002); V.V. Shvartsman, A.L. Kholkin, M. Tyunina, J. Levoska, Appl. Phys. Lett. 86, 222907 (2005).
A.N. Salak, V.V. Shvartsman, M.P. Seabra, A.L. Kholkin, V.M. Ferreira, J. Phys.: Condens. Matter 16, 2785 (2004).
S.V. Kalinin, B.J. Rodriguez, S. Jesse, P. Maksymovych, K. Seal, A.P. Baddorf, A. Kholkin, R. Proksch, Mater. Today 11, 16 (2008).
F. Bai, J.-F. Li, D. Viehland, Appl. Phys. Lett. 85, 4457 (2004).
O. Ambacher, J. Majewski, C. Miskys, A. Link, M. Hermann, M. Eickhoff, M. Stutzmann, F. Bernardini, V. Fiorentini, V. Tilak, B. Schaff, L.F. Eastman, J. Phys.: Condens. Matter 14, 3399 (2002).
B.J. Rodriguez, A. Gruverman, A.I. Kingon, R.J. Nemanich, Appl. Phys. Lett. 80, 4166 (2002).
E. Fukada, I. Yasuda, J. Phys. Soc. Jpn. 12, 1158 (1957).
S.B. Lang, Nature 5063, 704 (1966).
E. Fukada, J. Phys. Soc. Jpn. 10, 149 (1955).
E. Fukada, Biorheology 32, 593 (1995).
D.B. Li, D.A. Bonnell, Annu. Rev. Mater. Res. 38, 351 (2008).
T. Hidaka, T. Maruyama, I. Sakai, M. Saitoh, L.A. Wills, R. Hiskes, S.A. Dicarolis, J. Amano, Integr. Ferroelectr. 17, 319 (1997).
Y. Cho, K. Fujimoto, Y. Hiranaga, Y. Wagatsuma, A. Onoe, K. Terabe, K. Kitamura, Appl. Phys. Lett. 81, 4401 (2002).
K. Terabe, S. Takekawa, M. Nakamura, K. Kitamura, S. Higuchi, Y. Gotoh, A. Gruverman, Appl. Phys. Lett. 81, 2044 (2002).
G. Rosenman, P. Urenski, A. Agronin, Y. Rosenwaks, M. Molotski, Appl. Phys. Lett. 82, 103 (2003).
H. Park, J. Jung, D.-K. Min, S. Kim, S. Hong, H. Shin, Appl. Phys. Lett. 84, 1734 (2004).
S.V. Kalinin, A. Gruverman, Eds., Scanning Probe Microscopy: Electrical and Electromechanical Phenomena at the Nanoscale (Springer, New York, 2006).
Y. Cho, K. Ohara, Appl. Phys. Lett. 79, 3842 (2001).
H.F. Hamman, Y.C. Martin, H.K. Wickramasinghe, Appl. Phys. Lett. 84, 810 (2004).
Y. Cho, S. Hashimoto, N. Odagawa, K. Ta - naka, Y. Hiranaga, Nanotechnology 17, S137 (2006).
D.B. Li, D.A. Bonnell, Ceram. Int. 34, 157 (2008).
D.B. Li, M.H. Zhao, J. Garra, Nat. Mater. 7, 473 (2008).
M.H. Zhao, D.A. Bonnell, J.M. Vohs, Surf. Sci. 602, 2849 (2008).
Y. Yun, E.I. Altman, J. Am. Chem. Soc. 129, 15684 (2007).
R. Shao, M.P. Nikiforov, D.A. Bonnell, Appl. Phys. Lett. 89, 112904 (2006).
S.V. Kalinin, D.A. Bonnell, T. Alvarez, X. Lei, Z. Hu, J.H. Ferris, Nano Lett. 2, 589 (2002).
D.B. Li, D.R. Strachan, J.H. Ferris, D.A. Bonnell, J. Mater. Res. 21, 935 (2006).
S.V. Kalinin, D.A. Bonnell, T. Alvarez, X. Lei, Z. Hu, Z.H. Ferris, Q. Zhang, S. Dunn, Nano Lett. 2, 589 (2002).
C. Rankin, C. Chou, D. Conklin, D. Bonnell, ACS Nano 1, 234 (2007).
A. Gruverman, Appl. Phys. Lett. 75, 1452 (1999).
C. Harnagea, M. Alexe, J. Schilling, J. Choi, R.B. Wehrspohn, D. Hesse, U. Gösele, Appl. Phys. Lett. 83, 1827 (2003).
Z. Hu, M. Tian, B. Nysten, A.M. Jonas, Nat. Mater. 8, 62 (2009).
S.K. Streiffer, J.A. Eastman, D.D. Fong, C. Thompson, A. Munkholm, M.V. Ramana Murty, O. Auciello, G.R. Bai, G.B. Stephenson, Phys. Rev. Lett. 89, 67601 (2002).
C.F. Quate, Surf. Sci. 386, 259 (1997).
P. Vettiger, J. Brugger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. Lutwyche, H. Rothuizen, R. Stutz, R. Widmer, G. Binnig, Microelectron. Eng. 46, 11 (1999).
Y. Rosenwaks, D. Dahan, M. Molotskii, G. Rosenman, Appl. Phys. Lett. 86, 012909 (2005).
A.D.L. Humphris, M.J. Miles, J.K. Hobbs, Appl. Phys. Lett. 86, 034106 (2005).
M. Molotskii, E. Winebrand, Phys. Rev. B 71, 132103 (2005).
A.N. Morozovska, E.A Eliseev, S.V. Kalinin, Appl. Phys. Lett. 89, 192901 (2006).
G. Le Rhun, I. Vrejoiu, M. Alexe, Appl. Phys. Lett. 90, 012908 (2007).
G. Le Rhun, I. Vrejoiu, L. Pintilie, D. Hesse, M. Alexe, U. Gösele, Nanotechnology 17, 3154 (2006).
I.K. Bdikin, A.L. Kholkin, A.N. Morozovska, S.V. Svechnikov, S.-H. Kim, S.V. Kalinin, Appl. Phys. Lett. 92, 182909 (2008).
S. Jesse, A.P. Baddorf, S.V. Kalinin, Appl. Phys. Lett. 88, 062908 (2006).
S. Jesse, H.-N. Lee, S.V. Kalinin, Rev. Sci. Instrum. 77, 073702 (2006).
S.V. Kalinin, B.J. Rodriguez, S. Jesse, Y.H. Chu, T. Zhao, R. Ramesh, S. Choudhury, L.Q. Chen, E.A. Eliseev, A.N. Morozovska, Proc. Nat. Acad. Sci. U.S.A. 104, 20204 (2007).
B.J. Rodriguez, S. Jesse, M. Alexe, S.V. Kalinin, Adv. Mater. 20, 109 (2008).
S. Jesse, B.J. Rodriguez, S. Choudhury, A.P. Baddorf, I. Vrejoiu, D. Hesse, M. Alexe, E.A. Eliseev, A.N. Morozovska, J. Zhang, L.-Q Chen, S.V. Kalinin, Nat. Mater. 7, 209 (2008).
I. Vrejoiu, Philos. Mag. 86, 4477 (2006).
S.V. Kalinin, S. Jesse, B.J. Rodriguez, Y.H. Chu, R. Ramesh, E.A. Eliseev, A.N. Morozovska, Phys. Rev. Lett. 100, 155703 (2008).
Y.L. Li, S.Y. Hu, L.Q. Chen, J. Appl. Phys. 97, 034112 (2005).
M.J. Brukman, D.A. Bonnell, Phys. Today 61, 36 (2008).
S.V. Kalinin, B.J. Rodriguez, J. Shin, S. Jesse, V. Grichko, T. Thundat, A.P. Baddorf, A. Gruverman, Ultramicroscopy 106, 334 (2006).
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Bonnell, D.A., Kalinin, S.V., Kholkin, A.L. et al. Piezoresponse Force Microscopy: A Window into Electromechanical Behavior at the Nanoscale. MRS Bulletin 34, 648–657 (2009). https://doi.org/10.1557/mrs2009.176
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DOI: https://doi.org/10.1557/mrs2009.176