Abstract
This article provides a review of materials and devices of wide-bandgap oxide semiconductors based on ZnO, highlighting the nature of the chemical bond. The electronic structures of these materials are very different from those of conventional covalently bonded semiconductors, owing to the ionic nature of the chemical bonds. Therefore, one needs to design and optimize fabrication processes and structures of active devices containing such materials, taking into account the peculiar defect formation mechanisms. A variety of active devices that have clear advantages over the conventional ones have been demonstrated, for example, ultraviolet light-emitting diodes, quantum Hall devices, and transparent and flexible thin-film transistors with high electron mobility, paving the way for future applications. The reasons behind the successes identify future challenges in research on oxide semiconductors.
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Kamiya, T., Kawasaki, M. ZnO-Based Semiconductors as Building Blocks for Active Devices. MRS Bulletin 33, 1061–1066 (2008). https://doi.org/10.1557/mrs2008.226
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DOI: https://doi.org/10.1557/mrs2008.226