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MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films

  • CVD Diamond—Research, Applications, and Challenges
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Abstract

Diamond, because of its unique physical, chemical, and electrical properties and the feasibility of growing it in thin-film form, is an ideal choice as a material for the fabrication of reliable, long endurance, microelectromechanical/nanoelectromechanical systems (MEMS/NEMS). However, various practical challenges, including wafer-scale thickness uniformity, CMOS compatibility, surface micromachining, and, more importantly, controlling the internal stress of the diamond films, make this material more challenging for MEMS engineers. Recent advances in the growth of diamond films using chemical vapor deposition have changed this landscape since most technical hurdles have been overcome, enabling a new era of diamondbased MEMS and NEMS development. This article discusses a few examples of MEMS and NEMS devices that have been fabricated using mono-, nano-, and ultrananocrystalline diamond films as well as their performance.

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Acknowledgments

A.V.S. and O.A. would like to acknowledge funding supported by DARPA under contracts MIPR 06-W238, and by the US Department of Energy, Office of Science, Office of Basic Energy Sciences-Materials Science, under Contract No. DE-AC02–06CH11357. Use of the Center for Nanoscale Materials was supported by the US Department of Energy, Office of Science, and Office of Basic Energy Sciences under Contract No. DE-AC02–06CH11357. O.A. would like to acknowledge support from UTD through the Endowed Chair Professor initiation. O.W. would like to acknowledge Marie Curie Actions for his Intra-European Fellowship.

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Authors and Affiliations

  1. Argonne National Laboratory, IL, USA

    Anirudha V. Sumant

  2. University of Texas at Dallas, USA

    Orlando Auciello

  3. National Institute for Materials Science, Japan

    Meiyong Liao

  4. School of Physics and Astronomy, Cardiff University, UK

    Oliver A. Williams

Authors
  1. Anirudha V. Sumant
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  2. Orlando Auciello
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  3. Meiyong Liao
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  4. Oliver A. Williams
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Correspondence to Anirudha V. Sumant.

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Sumant, A.V., Auciello, O., Liao, M. et al. MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films. MRS Bulletin 39, 511–516 (2014). https://doi.org/10.1557/mrs.2014.98

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