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Combinatorial nanocalorimetry

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Abstract

The parallel nano-scanning calorimeter (PnSC) is a silicon-based micromachined device for calorimetric measurement of nanoscale materials in a high-throughput methodology. The device contains an array of nanocalorimeters. Each nanocalorimeter consists of a silicon nitride membrane and a tungsten heating element that also serves as a temperature gauge. The small mass of the individual nanocalorimeters enables measurements on samples as small as a few hundred nanograms at heating rates up to 104 K/s. The sensitivity of the device is demonstrated through the analysis of the melting transformation of a 25-nm indium film. To demonstrate the combinatorial capabilities, the device is used to analyze a Ni-Ti-Zr sample library. The as-deposited amorphous samples are crystallized by local heating in a process that lasts just tens of milliseconds. The martensite-austenite transformation in the Ni-Ti-Zr shape memory alloy system is analyzed and the dependence of transformation temperature and specific heat on composition is revealed.

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  1. School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts, 02138, USA

    Patrick J. McCluskey & Joost J. Vlassak

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  1. Patrick J. McCluskey
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  2. Joost J. Vlassak
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Correspondence to Joost J. Vlassak.

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McCluskey, P.J., Vlassak, J.J. Combinatorial nanocalorimetry. Journal of Materials Research 25, 2086–2100 (2010). https://doi.org/10.1557/jmr.2010.0286

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