Abstract
The crystallization kinetics of the pyrochlore to perovskite phase transformation in lead zirconate titanate (PZT) thin films have been analyzed using rapid thermal processing (RTP). Sol-gel PZT thin films, fabricated on platinum electrodes, were annealed at 550 °C to 650 °C with hold times ranging from 1 s to 5 min. Glancing angle x-ray diffraction (XRD) was used for depth profiling to identify the location of phases in the films. Transmission electron microscopy (TEM) provided information on grain structure, nucleation, and growth. The phase information was correlated to the ferroelectric and dielectric properties. The perovskite phase nucleated in the pyrochlore phase throughout the film thickness, and at 650 °C the transformation was complete in 15 s. Fast growing (100) PZT nucleated at the platinum and consumed a small-grained matrix until a columnar structure was obtained. A ramp rate of 100 °C/s was sufficiently fast to prevent transformation during heating and allowed the direct application of an Avrami model for transformation kinetics. An activation energy of 610 kJ/mol was determined.
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Ferroelectric Thin Films III, edited by B. A. Tuttle, E. R. Myers, S. B. Desu, and P. K. Larsen (Mater. Res. Soc. Symp. Proc. 310, Pittsburgh, PA, 1993).
H. N. Al-Shareef, A. I. Kingon, X. Chen, K. R. Bellur, and O. Auciello, J. Mater. Res. 9, 2968 (1994).
M. Klee, R. Eusemann, R. Waser, W. Brand, and H. van Hal, J. Appl. Phys. 72 (4), 1566 (1992).
I. M. Reany, K. Brooks, R. Klissurska, C. Pawlaczyk, and N. Setter, J. Am. Ceram. Soc. 77 (5), 1209 (1994).
R. Ramesh, T. Sands, and V. G. Keramidas, Appl. Phys. Lett. 63 (6), 731 (1993).
B. Tuttle, J. A. Voigt, D. C. Goodnow, D. L. Lamppa, T. J. Headley, M. O. Eatough, G. Zender, R. D. Nasby, and S. M. Rodgers, J. Am. Ceram. Soc. 76 (6), 1537 (1993).
A. Kingon et al., in Proceedings of NATO Advanced Studies Workshop on Ferroelectric Thin Films, Italy, June 1994.
J. S. Lee, C. J. Ki, D. S. Yoon, C. G. Ckoi, J. M. Kim, and K. No, Jpn. J. Appl. Phys. 33, 260 (1994).
C. K. Kwok and S. B. Desu, J. Mater. Res. 8, 339 (1993).
T. Tani and D. A. Payne, J. Am. Ceram. Soc. 77 (5), 1242 (1994).
E. M. Griswold, M. Sayer, and L. Weaver, in Proceedings of the 6th International Symposium on Integrated Ferroelectrics (ISIF 94), Monterey, CA, 1994, J. Integrated Ferroelectrics 8, 109 (1995).
H. Hu, C. J. Peng, and S. B. Krupanidhi, Thin Solid Films 223, 327 (1993).
C. V. R. Vasant Kumar, R. Pascual, and M. Sayer, J. Appl. Phys. 71 (2), 864 (1992).
M. Sayer, in Proceedings of 3rd International Symposium on Integrated Ferroelectrics (ISIF 91), Colorado Springs, CO (April 1991), p. 1.
M. Sayer and M. Sedlar, in Proceedings of 6th International Symposium on Integrated Ferroelectrics (ISIF 94), Monterey, CA, March 1994, J. Integrated Ferroelectrics 6, 129 (1995).
L. Weaver, J. Res. Micros. Techniques (1995, in press).
S. Chen and I. Chen, J. Am. Ceram. Soc. 77 (9) 2332 (1994).
C. K. Kim, D. S. Yoon, J. S. Lee, C. G. Choi, and K. No, Jpn. J. Appl. Phys. 33, 2675 (1994).
E. K. F. Dang and R. J. Gooding, Phys. Rev. Lett. 74, 3848 (1995).
K. Sreenivas, I. Reany, T. Maeder, N. Setter, C. Jagadish, and R. G. Elliman, J. Appl. Phys. 75 (1), 232 (1994).
E. M. Griswold, M. Sayer, D. T. Amm, and I. D. Calder, Can. J. Phys. 69, 260 (1991).
M. Avrami, Chem. Phys. 7 (12), 1103 (1939).
S. Ranganathan and M. von Heimendahl, J. Mater. Sci. 16, 2401 (1981).
C. K. Kwok and S. B. Desu, Ferroelectric Films, edited by A. S. Balla and K. M. Nair (Ceram. Trans. 25, American Ceramics Society, Westerville, OH, 1992), p. 85.
J. A. Voigt, B. A. Turtle, T. J. Headly, M. O. Eatough, D. L. Lamppa, and D. Goodnow, in Ferroelectric Thin Films III, edited by B. A. Turtle, E. R. Myers, S. B. Desu, and P. K. Larsen (Mater. Res. Soc. Symp. Proc. 310, Pittsburgh, PA, 1993), p. 15.
E. M. Griswold, L. Weaver, I. D. Calder, and M. Sayer, in Ferroelectric Thin Films IV, edited by S. B. Desu, B. A. Turtle, R. Ramesh, and T. Shiosaki (Mater. Res. Soc. Symp. Proc. 361-C5, Pittsburgh, PA, 1995), p. 389.
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Griswold, E.M., Weaver, L., Sayer, M. et al. Phase transformations in rapid thermal processed lead zirconate titanate. Journal of Materials Research 10, 3149–3159 (1995). https://doi.org/10.1557/JMR.1995.3149
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DOI: https://doi.org/10.1557/JMR.1995.3149