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OMCVD of thin films from metal diketonates and triphenylbismuth

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Abstract

Films containing the metals copper, yttrium, calcium, strontium, barium, and bismuth were grown by organometallic chemical vapor deposition (OMCVD). Depositions were carried out at atmospheric pressure in an oxygen-rich environment using metal beta-diketonates and triphenylbismuth. The films were characterized by Auger electron spectroscopy, Nomarski and scanning electron microscopy, and x-ray diffraction. The results show that films containing yttrium consisted of Y2O3 with a small amount of carbidic carbon, those with copper and bismuth were mixtures of oxides with no detectable carbon, and those with calcium, strontium, and barium contained carbonates. Use of a partially fluorinated barium beta-diketonate gave films of BaF2 with small amounts of BaCO3.

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Authors and Affiliations

  1. ##, Naval Research Laboratory, DC, 20375–5000, Washington, USA

    A. D. Berry, R. T. Holm, M. Fatemi & D. K. Gaskill

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  1. A. D. Berry
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  2. R. T. Holm
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  3. M. Fatemi
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  4. D. K. Gaskill
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Berry, A.D., Holm, R.T., Fatemi, M. et al. OMCVD of thin films from metal diketonates and triphenylbismuth. Journal of Materials Research 5, 1169–1175 (1990). https://doi.org/10.1557/JMR.1990.1169

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  • DOI: https://doi.org/10.1557/JMR.1990.1169

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