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Ionoluminescence in the Helium Ion Microscope

Published online by Cambridge University Press:  14 December 2012

Stuart A. Boden ,
Thomas M.W. Franklin ,
Larry Scipioni ,
Darren M. Bagnall  and
Harvey N. Rutt
Stuart A. Boden*
Affiliation:
Electronics and Computer Science, University of Southampton, Highfield, Southampton SO17 1BJ, UK
Thomas M.W. Franklin
Affiliation:
Optoelectronics Research Centre, University of Southampton, Highfield, Southampton SO17 1BJ, UK
Larry Scipioni
Affiliation:
Carl Zeiss SMT, Inc., One Corporation Way, Peabody, MA 01960, USA
Darren M. Bagnall
Affiliation:
Electronics and Computer Science, University of Southampton, Highfield, Southampton SO17 1BJ, UK
Harvey N. Rutt
Affiliation:
Electronics and Computer Science, University of Southampton, Highfield, Southampton SO17 1BJ, UK
*
*Corresponding author. E-mail: sb1@ecs.soton.ac.uk
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Abstract

Ionoluminescence (IL) is the emission of light from a material due to excitation by an ion beam. In this work, a helium ion microscope (HIM) has been used in conjunction with a luminescence detection system to characterize IL from materials in an analogous way to how cathodoluminescence (CL) is characterized in a scanning electron microscope (SEM). A survey of the helium ion beam induced IL characteristics, including images and spectra, of a variety of materials known to exhibit CL in an SEM is presented. Direct band-gap semiconductors that luminesce strongly in the SEM are found not do so in the HIM, possibly due to defect-related nonradiative pathways created by the ion beam. Other materials do, however, exhibit IL, including a cerium-doped garnet sample, quantum dots, and rare-earth doped LaPO4 nanocrystals. These emissions are a result of transitions between f electron states or transitions across size dependent band gaps. In all these samples, IL is found to decay with exposure to the beam, fitting well to double exponential functions. In an exploration of the potential of this technique for biological tagging applications, imaging with the IL emitted by rare-earth doped LaPO4 nanocrystals, simultaneously with secondary electron imaging, is demonstrated at a range of magnifications.

Keywords

cathodoluminescenceionoluminescencehelium ion microscopyscanning electron microscopyyttrium aluminum garnet (YAG)rare earthquantum dots
Type
Special Section: Cathodoluminescence
Information
Microscopy and Microanalysis , Volume 18 , Issue 6 , December 2012 , pp. 1253 - 1262
Copyright
Copyright © Microscopy Society of America 2012

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References

Abrams, B.L. & Holloway, P.H. (2004). Role of the surface in luminescent processes. Chem Rev 104, 5783–5801.Google Scholar
Biersack, J.P. & Haggmark, L.G. (1980). A Monte Carlo computer program for the transport of energetic ions in amorphous targets. Nucl Instrum Methods Phys Res 174, 257–269.Google Scholar
Cohen-Tanugi, D. & Yao, N. (2008). Superior imaging resolution in scanning helium-ion microscopy: A look at beam-sample interactions. J Appl Phys 104, 063504. Google Scholar
Drouin, D., Couture, A.R., Joly, D., Tastet, X., Aimez, V. & Gauvin, R. (2007). CASINO V2.42: A fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users. Scanning 29, 92–101.CrossRefGoogle ScholarPubMed
Fisher, P.J., Wessels, W.S, Dietz, A.B. & Prendergast, F.G. (2008). Enhanced biological cathodoluminescence. Opt Commun 281, 1901–1908.Google Scholar
Fisher, P.J., Wessels, W.S., Dietz, A.B. & Prendergast, F.G. (2010). Immuno-fluorescence scanning electron microscopy of biological cells. Microsc Today 18, 8–13.Google Scholar
Hastenrath, M. & Kubalek, E. (1982). Time-resolved cathodoluminescence in scanning electron microscopy. In Scanning Electron Microscopy, Johari, O. (Ed.), p. 157. Chicago, IL: SEM, Inc. Google Scholar
Jang, H.S., Kang, J.H., Won, Y.-H., Lee, S. & Jeon, D.Y. (2007). Mechanism for strong yellow emission of Y3Al5O12:Ce3+ phosphor under electron irradiation for the application to field emission backlight units. Appl Phys Lett 90, 071908. Google Scholar
Jardin, C., Canut, B. & Ramos, S. (1996). The luminescence of sapphire subjected to the irradiation of energetic hydrogen and helium ions. J Phys D Appl Phys 29, 2066–2070.Google Scholar
Kucheyev, S.O., Toth, M., Phillips, M.R., Williams, J.S., Jagadish, C. & Li, G. (2001). Cathodoluminescence depth profiling of ion-implanted GaN. Appl Phys Lett 78, 34.Google Scholar
Maqbool, M., Jadwisienczak, W.M. & Kordesch, M.E. (2012). Cathodoluminescence from amorphous and nanocrystalline nitride thin films doped with rare earth and transition metals. In Cathodoluminescence, Yamamoto, N. (Ed.), pp. 161–205. Rijeka, Croatia: InTech.Google Scholar
Miyauchi, M. & Shibata, N. (1993). Cathodoluminescence measurement of surfaces in reflection high-energy electron diffraction experiments. Jpn J Appl Phys P2 Lett 32, 1179–1181.Google Scholar
Monteiro, T., Pereira, E., Correia, M., Xavier, C., Hofmann, D., Meyer, B., Fischer, S., Cremades, A. & Piqueras, J. (1997). Broad emission band in GaN epitaxial layers grown on 6H-SiC and sapphire. J Lumin 72, 696–700.Google Scholar
Pan, Y., Wu, M. & Su, Q. (2004). Comparative investigation on synthesis and photoluminescence of YAG:Ce phosphor. Mater Sci Eng B 106, 251–256.Google Scholar
Pennycook, S.J. (2008). Investigating the optical properties of dislocations by scanning transmission electron microscopy. Scanning 30, 287–298.Google Scholar
Riwotzki, K., Meyssamy, H., Kornowski, A. & Haase, M. (2000). Liquid-phase synthesis of doped nanoparticles: Colloids of luminescing LaPO4:Eu and CePO4:Tb particles with a narrow particle size distribution. J Phys Chem B 104, 2824–2828.Google Scholar
Riwotzki, K., Meyssamy, H., Schnablegger, H., Kornowski, A. & Haase, M. (2001). Liquid-phase synthesis of colloids and redispersible powders of strongly luminescing LaPO4:Ce,Tb nanocrystals. Angew Chem 40, 573–576.Google Scholar
Schuetz, P. & Caruso, F. (2002). Electrostatically assembled fluorescent thin films of rare-earth-doped lanthanum phosphate nanoparticles. Chem Mater 14, 4509–4516.Google Scholar
Scipioni, L. (2008). Carl Zeiss application note: Ultra-high resolution imaging by Orion PLUS. Available at: http://www.zeiss.de/C1256E4600307C70/EmbedTitelIntern/EN_40_011_026_orion_ultra-high_resolution.pdf/$File/EN_40_011_026_orion_ultra-high_resolution.pdf (accessed June 30, 2012).Google Scholar
Scipioni, L., Stern, L. & Notte, J.A. (2007). Applications of the helium ion microscope. Microsc Today 15, 12–14.Google Scholar
Scipioni, L., Stern, L.A., Notte, J., Sijbrandij, S. & Griffin, B. (2008). Helium ion microscope. Adv Mater Proc 166, 27–30.Google Scholar
Seager, C.H., Warren, W.L. & Tallant, D.R. (1997). Electron-beam-induced charging of phosphors for low voltage display applications. J Appl Phys 81, 7994. Google Scholar
Smith, J.V. & Stenstrom, R.C. (1965). Electron-excited luminescence as a petrologic tool. J Geol 73, 627–635.Google Scholar
Vanden Berg-Foels, W.S., Scipioni, L, Huynh, C. & Wen, X. (2012). Helium ion microscopy for high-resolution visualization of the articular cartilage collagen network. J Microsc 246, 168–176.Google Scholar
Wakefield, B., Eaves, L., Prior, K., Nelson, A. & Davies, G. (1984). The 1.36 eV radiative transition in InP: Its dependence on growth conditions in MBE and MOCVD material. J Phys D Appl Phys 17, L133–L136.Google Scholar
Ward, B.W., Notte, J.A. & Economou, N.P. (2006). Helium ion microscope?: A new tool for nanoscale microscopy and metrology. J Vac Sci Technol B 24, 2871–2874.Google Scholar
Yacobi, B. & Holt, D. (1986). Cathodoluminescence scanning electron microscopy of semiconductors. J Appl Phys 59, R1–R24.Google Scholar
Yuan, J., Berger, S. & Brown, L.M. (1989). Thickness dependence of cathodoluminescence in thin films. J Cond Matter 1, 3253–3265.CrossRefGoogle Scholar
Zeigler, J.F., Biersack, J.P. & Littmark, U. (1985). The Stopping and Range of Ions in Solids. New York: Pergamon Press.Google Scholar