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Microcharacterization of Semiconductor Device Materials using Kelvin Probe Microscopy

Published online by Cambridge University Press:  05 August 2007

M Stevens-Kalceff
Affiliation:
University of New South Wales,Australia
T Sobey
Affiliation:
University of New South Wales,Australia
D Kruss
Affiliation:
University of New South Wales,Australia
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Copyright
© 2007 Microscopy Society of America

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