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COMPENSATION OF THE INTERNAL STRESS GRADIENT IN ULTRANANOCRYSTALLINE DIAMOND FOR THE FABRICATION OF MICROACTUATORS AND TRIBOMETERS ON A CHIP

Published online by Cambridge University Press:  21 February 2013

Federico Buja
Affiliation:
TU Delft, 3ME, MNE, Delft, Nederlands.
Ralu Divan
Affiliation:
Center for Nanoscale Material, Argonne National Laboratory, Argonne, IL 60439, U.S.A.
Anirudha V. Sumant
Affiliation:
Center for Nanoscale Material, Argonne National Laboratory, Argonne, IL 60439, U.S.A.
David Czaplewski
Affiliation:
Center for Nanoscale Material, Argonne National Laboratory, Argonne, IL 60439, U.S.A.
W. Merlijn van Spengen
Affiliation:
TU Delft, 3ME, MNE, Delft, Nederlands.
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Abstract

The excellent tribological performance of ultrananocrystalline diamond (UNCD) makes this material a potential candidate for the fabrication of long endurance micro/nano-electro-mechanical systems (MEMS/NEMS) that could involve contacting surfaces. In this work, UNCD and nitrogen incorporated UNCD (N-UNCD) microstructures have been produced and investigated, in order to analyze their intrinsic stress component. A solution for stress reduction is proposed: the application of a titanium stress-compensation coating seems to be an optimum route to obtain flat, free-standing N-UNCD films.

Type
Articles
Copyright
Copyright © Materials Research Society 2013 

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References

REFERENCES

Anirudha V., Sumant et al. ., MRS Bulletin, 35(4), 281 (2010).Google Scholar
Jeffrey T., Paci, Belytschko, Ted, Schatz, George, Physical Review B, 74, 184112 (2006)Google Scholar
Auciello, Orlando, Sumant, A.V.., Status review of the science and technology of ultrananocrystalline diamond (UNCD™) films and application to multifunctional devices. Diamond and related materials, 2010. 19: p. 699718.CrossRefGoogle Scholar
Wang, X., Ocola, L.E., Divan, R., Sumant, A.V., Nanotechnology 23, 075301 (2012)CrossRefGoogle Scholar
Fang, W, Wickert, J.A.., J. Micromech. Microeng., 6, 301309 (1996).CrossRefGoogle Scholar
van Drieenhuizen, B P, J.F.L.G., French, P J, Wolffenbuttel, R F, Comparison of techniques for measuring both compressive and tensile stress in thin films. Sensors and Actuators A, 1993. 37: p. 756765.CrossRefGoogle Scholar