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Original Article

ALD of Al₂O₃ for Carbon Nanotube vertical interconnect and its impact on the electrical properties

Nicolo’ Chiodarelli, Annelies Delabie, Sugiura Masahito, Yusaku Kashiwagi, Olivier Richard, Hugo Bender, D. J. Cott, Marc Heyns, Stefan De Gendt, Guido Groeseneken and Philippe M. Vereecken

MRS Online Proceedings Library,

doi:10.1557/opl.2011.727 (About DOI), Available on CJO 14 April 2011

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Original Article