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Optical properties of high-quality nanohole arrays in gold made using soft-nanoimprint lithography

Published online by Cambridge University Press:  24 November 2015

M.A. Verschuuren ,
M.J.A. de Dood ,
D. Stolwijk ,
G.W. ‘t Hooft  and
A. Polman
M.A. Verschuuren
Affiliation:
Philips Research, High Tech Campus 4, 5656 AE, Eindhoven, The Netherlands
M.J.A. de Dood
Affiliation:
Huygens Laboratory, P.O. Box 9504, 2300 RA, Leiden, The Netherlands
D. Stolwijk
Affiliation:
Huygens Laboratory, P.O. Box 9504, 2300 RA, Leiden, The Netherlands
G.W. ‘t Hooft
Affiliation:
Philips Research, High Tech Campus 4, 5656 AE, Eindhoven, The Netherlands Huygens Laboratory, P.O. Box 9504, 2300 RA, Leiden, The Netherlands
A. Polman*
Affiliation:
Centre for Nanophotonics, FOM Institute AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
*
Address all correspondence to A. Polman atpolman@amolf.nl
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Abstract

We present a novel soft-nanoimprint procedure to fabricate high-quality sub-wavelength hole arrays in optically thick films of gold on glass substrates. We fabricate 0.5 × 0.5 mm2 structures composed of a square array of 180 nm-diameter holes with a 780 nm pitch. Optical angular transmission measurements on the arrays show clear extraordinary transmission peaks corresponding to the dispersion of surface plasmon polaritons propagating on either side of the metal film. The transmission features can be strongly controlled by engineering the dielectric environment around the holes. As the nanoimprint procedure enables fabrication of nanoscale patterns over wafer-scale areas at low cost, these imprinted metal nanoparticle arrays can find applications in, e.g., optical components, photovoltaics, integrated optics, and microfluidics.

Type
Plasmonics, Photonics, and Metamaterials Research Letters
Information
MRS Communications , Volume 5 , Issue 4 , December 2015 , pp. 547 - 553
Copyright
Copyright © Materials Research Society 2015 

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