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Quantitative Position-Averaged K-, L-, and M-Shell Core-Loss Scattering in STEM

Published online by Cambridge University Press:  13 May 2014

Ye Zhu  and
Christian Dwyer
Ye Zhu
Affiliation:
Monash Centre for Electron Microscopy, Monash University, Victoria 3800, Australia Department of Materials Engineering, Monash University, Victoria 3800, Australia
Christian Dwyer*
Affiliation:
Monash Centre for Electron Microscopy, Monash University, Victoria 3800, Australia Ernst Ruska-Centre and Peter Grünberg Institute, Forschungszentrum Jülich, Jülich D-52425, Germany
*
*Corresponding author.c.dwyer@fz-juelich.de
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Abstract

We present a quantitative comparison between experimental position-averaged core-loss scattering from K-, L-, and M-shells of various elements and simulations based on a single-particle description of the core-loss process. To facilitate a direct comparison free of adjustable or compensating parameters, we compare absolute scattering cross-sections for zone-axis-aligned crystals whose thicknesses have been measured independently. The results show that the single-particle model accurately predicts the absolute scattering intensity from K-shells, and L-shells in some cases, but achieves only semi-quantitative agreement for M-shells.

Keywords

quantitative spectroscopyquantitative STEMcore-loss cross-sectionmultislice simulationdouble channeling
Type
FEMMS Special Issue
Information
Microscopy and Microanalysis , Volume 20 , Issue 4 , August 2014 , pp. 1070 - 1077
Copyright
© Microscopy Society of America 2014 

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