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Simulation of Space Charge Effects in Electron Optical System Based on the Calculations of Current Density

Published online by Cambridge University Press:  28 September 2015

Jiří Zelinka ,
Martin Oral  and
Tomáš Radlička
Jiří Zelinka
Affiliation:
Institute of Scientific Instruments of the ASCR, v.v.i., Královopolská 147, 612 64 Brno, Czech Republic
Martin Oral
Affiliation:
Institute of Scientific Instruments of the ASCR, v.v.i., Královopolská 147, 612 64 Brno, Czech Republic
Tomáš Radlička
Affiliation:
Institute of Scientific Instruments of the ASCR, v.v.i., Královopolská 147, 612 64 Brno, Czech Republic

Abstract

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We present a numerical method for iterative computation of electron optical systems influenced by space charge with an improved accuracy in the same calculation time. We replace the common algorithm for evaluating the space charge distribution with a new one based on the calculation of the current density distribution from an aberration polynomial. We introduce a re-meshing algorithm which adapts the mesh used for the field calculation by the finite element method in each iteration to the actual space charge distribution to keep it sufficiently fine in all areas with non-zero space charge.

Type
Numerical Methods
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 246 - 251
Copyright
Copyright © Microscopy Society of America 2015 

References

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