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Influence of Saturation of Magnetic Lens Material on Fields of Deflectors and Parasitic Fields

Published online by Cambridge University Press:  28 September 2015

J. Zlámal  and
B. Lencová
J. Zlámal
Affiliation:
Institute of Physical Engineering, Brno University of Technology, Technická 2, 616 69 Brno, Czech Republic CEITEC BUT, Technická 10, 616 69 Brno, Czech Republic
B. Lencová
Affiliation:
Institute of Physical Engineering, Brno University of Technology, Technická 2, 616 69 Brno, Czech Republic TESCAN Brno, s.r.o., Libušina tř. 1, 62300 Brno, Czech Republic

Abstract

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Type
Numerical Methods
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 188 - 193
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

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[11] This work was supported by European Regional Development Fund (CEITEC-CZ.1.05/1.1.00/02.0068)..Google Scholar