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Probing and Analyzing Buried Interfaces of Multifunctional Oxides Using a Secondary Electron Energy Analyzer

Published online by Cambridge University Press:  17 July 2014

Avinash Srinivasan*
Affiliation:
Department of Electrical and Computer Engineering, Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR), National University of Singapore, Singapore 117581
Anjam Khursheed
Affiliation:
Department of Electrical and Computer Engineering, Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR), National University of Singapore, Singapore 117581
*
*Corresponding author. E-mail: a0066493@nus.edu.sg
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Abstract

A contactless method of probing and analyzing multifunctional oxide interfaces using an electron energy analyzer inside a scanning electron microscope is presented. High contrast experimental secondary electron analyzer signals are used to detect changes in the interface conductivity of a LaAlO3/SrTiO3 sample. Monte Carlo simulations of the primary beam/specimen interaction are carried out and correlated with the experimental results in order to help understand the role of the primary beam energy and adjust it to enhance contrast.

Type
Materials Applications
Copyright
© Microscopy Society of America 2014 

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