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Enhanced Quantification for 3D Energy Dispersive Spectrometry: Going Beyond the Limitation of Large Volume of X-Ray Emission

Published online by Cambridge University Press:  24 June 2014

Pierre Burdet ,
Cécile Hébert  and
Marco Cantoni
Pierre Burdet*
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, Charles Babbage Road 27, Cambridge CB3 0FS, Cambridgeshire, UK
Cécile Hébert
Affiliation:
Centre Interdisciplinaire de Microscopie Electronique, Ecole Polytechnique Fédérale de Lausanne (EPFL), Station 12, Lausanne 1015, Switzerland
Marco Cantoni
Affiliation:
Centre Interdisciplinaire de Microscopie Electronique, Ecole Polytechnique Fédérale de Lausanne (EPFL), Station 12, Lausanne 1015, Switzerland
*
*Corresponding author. pb565@cam.ac.uk
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Abstract

This paper presents a method developed to quantify three-dimensional energy dispersive spectrometry (3D EDS) data with voxel size smaller than the volume from which X-rays are emitted. The influence of the neighboring voxels is corrected by applying recursively a complex quantification, improving thereby the accuracy of the quantification of critically small features. The enhanced quantification method is applied to simulated and measured data. A systematic improvement is obtained compared with classical quantification, proving the concept and the prospect of this method.

Keywords

energy dispersive X-ray spectrometryfocused ion beamtomographic spectral imaging3D chemical analysis3D microanalysisquantification3D image analysis
Type
Materials Applications
Information
Microscopy and Microanalysis , Volume 20 , Issue 5 , October 2014 , pp. 1544 - 1555
Copyright
© Microscopy Society of America 2014 

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