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MEMS-based fine tuning of high Q-factor E-plane filters

Published online by Cambridge University Press:  11 August 2014

Fabrizio Gentili
Affiliation:
Department of Engineering (DI), University of Perugia, Via G. Duranti 93, Perugia 06125, Italy
Valeria Nocella*
Affiliation:
Department of Engineering (DI), University of Perugia, Via G. Duranti 93, Perugia 06125, Italy
Luca Pelliccia
Affiliation:
RF Microtech, Via P. Mascagni 11, Perugia 06132, Italy
Fabrizio Cacciamani
Affiliation:
Department of Engineering (DI), University of Perugia, Via G. Duranti 93, Perugia 06125, Italy
Paola Farinelli
Affiliation:
RF Microtech, Via P. Mascagni 11, Perugia 06132, Italy
Roberto Sorrentino
Affiliation:
Department of Engineering (DI), University of Perugia, Via G. Duranti 93, Perugia 06125, Italy
*
Corresponding author: L. Pelliccia Email: pelliccia@rfmicrotech.com

Abstract

This paper presents a new concept for the fine tuning of high-Q bandpass filters to compensate for small response deviations due to manufacturing tolerances and temperature variations. Discrete frequency tuning steps are obtained using a rectangular waveguide resonator loaded with a reconfigurable E-plane circuit. Ohmic micro electromechanical systems (MEMS) switches can be placed along thin E-plane metal strips so as to modify the E-field distribution of the TE101 resonant mode, thus the central frequency of the filter. As an example, 0.1% frequency steps can easily be obtained in a 10 GHz resonant cavity. The use of low-loss substrates ensures high-quality factors of the order of 1000. The feasibility of the proposed approach is demonstrated both by full-wave simulations and by fabricating and measuring an X-band hardwired prototype.

Type
Research Papers
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2014 

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References

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