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Analytical Formulae for Calculation of X-Ray Detector Solid Angles in the Scanning and Scanning/Transmission Analytical Electron Microscope

Published online by Cambridge University Press:  22 May 2014

Nestor J. Zaluzec
Nestor J. Zaluzec*
Affiliation:
Argonne National Laboratory, Electron Microscopy Center, Argonne, IL 60440, USA
*
*Corresponding author. Zaluzec@aaem.amc.anl.gov
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Abstract

Closed form analytical equations used to calculate the collection solid angle of six common geometries of solid-state X-ray detectors in scanning and scanning/transmission analytical electron microscopy are presented. Using these formulae one can make realistic comparisons of the merits of the different detector geometries in modern electron column instruments. This work updates earlier formulations and adds new detector configurations.

Keywords

solid angleXEDSmicroanalysisSTEMTEMSEMSDDSiLiX-ray detectorsEDSEDXS
Type
Techniques and Instrumentation Development
Information
Microscopy and Microanalysis , Volume 20 , Issue 4 , August 2014 , pp. 1318 - 1326
Copyright
© Microscopy Society of America 2014 

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