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Nanoimprint lithographic surface patterning of sol–gel fabricated nickel ferrite (NiFe2O4)

Published online by Cambridge University Press:  15 November 2013

Goran Rasic  and
Justin Schwartz
Goran Rasic*
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695-7907
Justin Schwartz
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695-7907
*
Address all correspondence to Goran Rasic atgrasic@ncsu.edu
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Abstract

Textured nickel ferrite (NFO, NiFe2O4) thin films were deposited at room temperature by chemical solution deposition onto c-plane sapphire substrates. A nanoimprint lithography technique using a polydimethylsiloxane stamp was used to transfer a pattern from a master to the thin film, which was subsequently annealed to crystallize the NFO. Atomic force microscopy scans showed good periodicity and feature profile over a large area which was confirmed with cross-sectional transmission electron microscopy. X-ray diffraction revealed textured single-phase inverse spinel NFO. Magnetic measurements of patterned thin films showed a large reduction in coercivity due to demagnetization factors.

Type
Research Letters
Information
MRS Communications , Volume 3 , Issue 4 , December 2013 , pp. 207 - 211
Copyright
Copyright © Materials Research Society 2013 

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