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COMPENSATION OF THE INTERNAL STRESS GRADIENT IN ULTRANANOCRYSTALLINE DIAMOND FOR THE FABRICATION OF MICROACTUATORS AND TRIBOMETERS ON A CHIP

IMRC 2012.

Federico Bujaa1, Ralu Divana2, Anirudha V. Sumanta2, David Czaplewskia2 and W. Merlijn van Spengena1

a1 TU Delft, 3ME, MNE, Delft, Nederlands.

a2 Center for Nanoscale Material, Argonne National Laboratory, Argonne, IL 60439, U.S.A.

ABSTRACT

The excellent tribological performance of ultrananocrystalline diamond (UNCD) makes this material a potential candidate for the fabrication of long endurance micro/nano-electro-mechanical systems (MEMS/NEMS) that could involve contacting surfaces. In this work, UNCD and nitrogen incorporated UNCD (N-UNCD) microstructures have been produced and investigated, in order to analyze their intrinsic stress component. A solution for stress reduction is proposed: the application of a titanium stress-compensation coating seems to be an optimum route to obtain flat, free-standing N-UNCD films.

Key Words:

  • diamond;
  • micromelectro-mechanical (MEMS);
  • tribology
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