Editors : A.V. Sumant, A.A. Balandin, S.A. Getty, F. Piazza
a1 TU Delft, 3ME, MNE, Delft, Nederlands.
a2 Center for Nanoscale Material, Argonne National Laboratory, Argonne, IL 60439, U.S.A.
The excellent tribological performance of ultrananocrystalline diamond (UNCD) makes this material a potential candidate for the fabrication of long endurance micro/nano-electro-mechanical systems (MEMS/NEMS) that could involve contacting surfaces. In this work, UNCD and nitrogen incorporated UNCD (N-UNCD) microstructures have been produced and investigated, in order to analyze their intrinsic stress component. A solution for stress reduction is proposed: the application of a titanium stress-compensation coating seems to be an optimum route to obtain flat, free-standing N-UNCD films.