MRS Proceedings


Patterned Micro/ Nanowires by Electroplate and Lift Lithography on Reusable Ultrananocrystalline Diamond Template

IMRC 2012.

Jeffrey Machoveca1, Lori A. Lepaka1, Anirudha V. Sumanta2, Ralu Divana2, C. Suzanne Millera2, Daniel Rosenmanna2 and Michael P. Zacha1 c1

a1 Chemistry Department, UW-Stevens Point, Stevens Point, WI 54481

a2 Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL 60439


Patterned micro-and nanowires composed of Iron Oxide (FexOy) were electrochemically deposited from an ionic liquid solution of choline chloride (ChCl) and urea, using ultrananocrystalline diamond (UNCD) ™ templates originally developed for Electroplate and Lift (E&L) Lithography. The wires were electroplated under varying rigor of anhydrous and inert atmosphere techniques, at voltages of either -2V or -5V vs. an Al/Al(III) reference electrode. The morphology of the deposited FexOy wires was studied by scanning electron microscopy (SEM), while their oxygen content was evaluated using energy dispersive spectroscopy (EDS). By using sublimed grade reagents and minimizing exposure to atmospheric water vapor and oxygen, the oxygen content of the electroplated wires decreased from 15 at% to 5 at%.

Key Words:

  • electrodeposition;
  • diamond;
  • Fe


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