Microscopy and Microanalysis

Instrumentation and Techniques

Nanometer Size Tungsten Markers Formation by a Helium Ion Microscope Equipped with Gas Injection System for Alignment of TEM Tomographic Tilt Series

Microscopy and Microanalysis 2011, Nashville, Tennessee, USA, Microscopy Society of America, Microanalysis Society, International Metallographic Society.

M Hayashidaa1, T Iijimaa1, S Ogawaa1 and T Fujimotoa1

a1 National Institute of Advanced Industrial Science and Technology, Japan

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.