Hostname: page-component-7c8c6479df-hgkh8 Total loading time: 0 Render date: 2024-03-28T09:08:03.002Z Has data issue: false hasContentIssue false

Nanometer Size Tungsten Markers Formation by a Helium Ion Microscope Equipped with Gas Injection System for Alignment of TEM Tomographic Tilt Series

Published online by Cambridge University Press:  09 April 2017

M Hayashida
Affiliation:
National Institute of Advanced Industrial Science and Technology, Japan
T Iijima
Affiliation:
National Institute of Advanced Industrial Science and Technology, Japan
S Ogawa
Affiliation:
National Institute of Advanced Industrial Science and Technology, Japan
T Fujimoto
Affiliation:
National Institute of Advanced Industrial Science and Technology, Japan

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2011