TEM Specimen Preparation with Plasma FIB Xe+ Ions

L Giannuzzi; N Smith

doi:10.1017/S1431927611004107

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

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TEM Specimen Preparation with Plasma FIB Xe+ Ions

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