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Laser Chemical Etching of Metals in Neutral Salt Solutions

Published online by Cambridge University Press:  26 February 2011

M. Datta ,
L. T. Romankiw ,
D. R. Vigliotti  and
R. J. von Gutfeld
M. Datta
Affiliation:
IBM T.J. Watson Research Center, Box 218, Yorktown Heights, NY 10598
L. T. Romankiw
Affiliation:
IBM T.J. Watson Research Center, Box 218, Yorktown Heights, NY 10598
D. R. Vigliotti
Affiliation:
IBM T.J. Watson Research Center, Box 218, Yorktown Heights, NY 10598
R. J. von Gutfeld
Affiliation:
IBM T.J. Watson Research Center, Box 218, Yorktown Heights, NY 10598
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Abstract

We report the first results of experiments using a focused argon ion laser to locally induce chemical etching of steel and stainless steel in neutral salt solutions for maskless patterning. The solutions include sodium chloride, sodium nitrate and potassium sulfate. Vertical etch rates up to 4 microns/s are observed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 449
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

1 McGeough, J. A., Principles of Electrochemical Machining, Chapman Hall, London, 1974.Google Scholar
2 Datta, M. and Landolt, D., Electrochim. Acta 25, 1255 (1980); also ibid. 1265 (1980).Google Scholar
3 von Gutfeld, R. J. and Hodgson, R. T., Appl. Phys. Lett 40, 352 (1982).Google Scholar