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Initial stages of SiOx deposition on graphite

Published online by Cambridge University Press:  03 March 2011

M. M. Hoveland
Affiliation:
Department of Materials Science, University of Pennsylvania, Philadelphia, Pennsylvania 19104–6272
J. B. Danner
Affiliation:
Department of Chemical Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104–6272
J. M. Vohs
Affiliation:
Department of Chemical Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104–6272
D. A. Bonnell
Affiliation:
Department of Materials Science, University of Pennsylvania, Philadelphia, Pennsylvania 19104–6272
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Abstract

The reaction of tetraethoxysilane (TEOS) and the subsequent deposition of SiOx on the basal plane and edges of highly oriented pyrolytic graphite (HOPG) were studied. Interfacial bonding and surface morphologies resulting from different reaction conditions were probed using scanning tunneling microscopy (STM), Auger electron spectroscopy (AES), Rutherford backscattering spectroscopy (RBS), temperature programmed desorption (TPD), and high resolution electron energy loss spectroscopy (HREELS). The initial reaction of TEOS was found to occur at surface defects. STM images indicated that SiCx films do not grow layer-by-layer, confirming earlier indirect observations to that effect.

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Articles
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

1Buckley, J. D., Ceram. Bull. 67, 364 (1988).Google Scholar
2Strife, J. R. and Sheehan, J. E., Ceram. Bull. 67, 369 (1988).Google Scholar
3McKee, D. W., Carbon 25, 551 (1987).CrossRefGoogle Scholar
4Sheehan, J. E., Carbon 27, 709 (1989).CrossRefGoogle Scholar
5Luthra, K. L., Carbon 26, 217 (1988).CrossRefGoogle Scholar
6Cochran, A. A., Stephenson, J. B., and Donaldson, J. G., J. Metals 37, August, 37 (1970).Google Scholar
7McKee, D. W., Spiro, C. L., and Lamby, E. J., Carbon 22, 507 (1984).CrossRefGoogle Scholar
8Hippo, E. J., Murdie, N., and Hyjazie, A., Carbon 27, 689 (1989).CrossRefGoogle Scholar
9Kozlowski, C. and Sherwood, P., Carbon 25, 751 (1987).CrossRefGoogle Scholar
10Kozlowski, C. and Sherwood, P., J. Chem. Soc, Faraday Trans. 1 81, 2745 (1985).CrossRefGoogle Scholar
11Kozlowski, C., and Sherwood, P., Carbon 24, 357 (1986).CrossRefGoogle Scholar
12Hoffman, W. P. and Ehrburger, P., J. Anal. Appl. Pyrolysis 15, 275 (1989).CrossRefGoogle Scholar
13Dannei, J. B., Rueter, M. A., and Vohs, J. M., Langmuir 9, 455 (1993).CrossRefGoogle Scholar
14Palmer, R. E., Annett, J. F., and Willis, R. F., Phys. Rev. Lett. 58, 2490 (1987).CrossRefGoogle Scholar
15Thiry, P. A., Liehr, M., Pireaux, J. J., Sporken, P., Caudano, R., Vigeron, J. PI., and Lucas, A. A., J. Vac. Sci. Technol. B 3, 1118 (1985).CrossRefGoogle Scholar