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X-Ray Scattering Studies of Multilayer Interfaces

Published online by Cambridge University Press:  21 February 2011

M. K. Sanyal
Affiliation:
Department of Physics, Brookhaven National Laboratory, NY 11973
S. K. Sinha
Affiliation:
Department of Physics, Brookhaven National Laboratory, NY 11973
A. Gibaud
Affiliation:
Department of Physics, Brookhaven National Laboratory, NY 11973
S. K. Satija
Affiliation:
National Institute of Standard and Technology, Maryland 20899
C. F. Majkrzak
Affiliation:
National Institute of Standard and Technology, Maryland 20899
H. Homma
Affiliation:
Physics Department, Brooklyn College of CUNY, NY 11210
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Abstract

The results of specular and diffuse x-ray scattering studies of multilayers are discussed. We show here that such studies can yield detailed statistical information about the interfacial roughness and morphology. Results on a GaAs/AlAs multilayer are presented and the data is analyzed within the Born approximation.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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References

4. References

1. Sinha, S.K., Sirota, E.B., Gasoff, S. and Stanley, H.B.. Phys. Rev. B 38, 2297 (1988).CrossRefGoogle Scholar
2. Sanyal, M.K., Sinha, S.K., Huang, K.G., and Ocko, B.M.. Phys. Rev. Lett. 66, 628 (1991).CrossRefGoogle Scholar
3. Sinha, S.K., Sanyal, M.K., Gibaud, A., Satija, S.K., Majkrzak, C.F., and Homma, H., presented at the NATO Advanced Study Institute Conference, Crete, Greece, 1990 (unpublished).Google Scholar