Journal of Materials Research


Laser-Induced Growth of Titanium Nitride Microcolumns on Biased Titanium Targets

E. Györgya1 c1, A. Pérez del Pinoa1a), P. Serraa1 and J.L. Morenzaa1 c1

a1 Universitat de Barcelona, Departament de Física Aplicada i Òptica, E-08028 Barcelona, Spain


Titanium targets with a bias voltage ranging from −500 to +500 V were submitted to multipulse high repetition rate Nd:yttrium aluminum garnet (YAG; λ = 1.064 μm, τ ∼ 300 ns, ν = 30 kHz) laser irradiations in nitrogen at intensity values below the single-pulse melting threshold. The morphology of the TiN structures formed under the cumulative action of the laser pulses on the surface of the unbiased and biased targets was investigated by profilometry and scanning electron microscopy. Under these irradiation conditions, a specific columnar surface microrelief developed. The height of the microcolumns reached about 10–15 μm, and their diameter about 1–2 μm. The development of TiN microcolumns was enhanced by the applied bias voltage. The enhancement in the negative biased samples was stronger than that in the positive biased ones.

(Received February 10 2004)

(Accepted August 20 2004)

Key Words:

  • Laser-induced reaction;
  • Structural;
  • Surface reaction


c1 Address all correspondence to this author. e-mail:


a) On leave from Institute of Atomic Physics, P.O.Box. MG. 36, Bucharest V, 76900, Romania