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Transmission Electron Microscopy and High-Resolution Transmission Electron Microscopy Study of Nanostructure and Metastable Phase Evolution in Pulsed-Laser-Ablation–Deposited Ti–Si Thin Film

Published online by Cambridge University Press:  03 March 2011

S. Bysakh ,
K. Mitsuishi ,
M. Song ,
K. Furuya  and
K. Chattopadhyay
S. Bysakh
Affiliation:
Nanomaterials Laboratory, National Institute for Materials Science, Tsukuba, Ibaraki 305 0003, Japan; and Department of Metallurgy, Indian Institute of Science, Bangalore 560012, India
K. Mitsuishi
Affiliation:
Nanomaterials Laboratory, National Institute for Materials Science, Tsukuba, Ibaraki 305 0003, Japan
M. Song
Affiliation:
Nanomaterials Laboratory, National Institute for Materials Science, Tsukuba, Ibaraki 305 0003, Japan
K. Furuya
Affiliation:
Nanomaterials Laboratory, National Institute for Materials Science, Tsukuba, Ibaraki 305 0003, Japan
K. Chattopadhyay
Affiliation:
Department of Metallurgy, Indian Institute of Science, Bangalore 560012, India
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Abstract

Thin films with a nominal composition close to Ti62.5Si37.5 were deposited on NaCl substrate at room temperature by pulsed laser ablation to study the evolution of the intermetallic compound Ti5Si3 using a combination of high-resolution and in situ transmission electron microscopy. The as-deposited amorphous films contain Ti-rich clusters, which influence the phase evolution and the decomposition behavior of the amorphous film. These clusters influence the nucleation of a metastable fcc Ti solid solution (ao = 0.433 nm) with composition richer in Ti than Ti62.5Si37.5 as the first phase to crystallize at 773 K. The Ti5Si3 nanocrystals form later, and even at 1073 K they coexist with fine fcc Ti-rich nanocrystals. Subsequent Ar+ ion-milling of the crystallized film results in a loss of silicon. The composition change leads to the dissolution of the Ti5Si3 nanocrystals and evolution of a new metastable Ti-rich fcc phase (ao= 0.408 nm).

Keywords

Laser ablationIntermetallic alloysMicrostructure
Type
Articles
Information
Journal of Materials Research , Volume 19 , Issue 4 , April 2004 , pp. 1118 - 1125
Copyright
Copyright © Materials Research Society 2004

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References

REFERENCES

1Krebs, H.U., Fahler, S. and Bremert, O.: Appl. Surf. Sci. 86, 86 (1995).CrossRefGoogle Scholar
2Dauscher, A., Thomy, A. and Scherrer, H.: Thin Solid Films. 280, 61 (1996).CrossRefGoogle Scholar
3Bysakh, S., Das, P.K. and Chattopadhyay, K.: Philos. Mag. A. 82, 1235 (2002).Google Scholar
4Naka, M., Matsui, T., Maeda, M. and Mori, H.: Mater. Trans. JIM. 36, 797 (1995).CrossRefGoogle Scholar
5Bysakh, S., Das, P.K. and Chattopadhyay, K.: J. Mater. Res. 18, 284 (2003).CrossRefGoogle Scholar
6Bysakh, S., Das, P.K. and Chattopadhyay, K.: Scr. Mater. 44, 1847 (2001).CrossRefGoogle Scholar
7Miller, M.K., Shen, T.D. and Schwarz, R.K.: J. Non-Cryst. Solids. 317, 10 (2003).CrossRefGoogle Scholar
8Miller, M.K., Shen, T.D. and Schwarz, R.K.: Intermetallics. 10, 1047 (2002).CrossRefGoogle Scholar
9Matsubara, E., Harada, K., Wasada, Y., Chen, H.S. and Inoue, A.: J. Mater. Sci. 23, 753 (1988).CrossRefGoogle Scholar
10Oehring, M. and Bormann, R.: Mater. Sci. Eng. A. 134, 1330 (1991).CrossRefGoogle Scholar
11Singh, R.K. and Narayan, J.: Phys. Rev. B. 41, 8843 (1990).CrossRefGoogle Scholar
12Teghil, R., D’Alessio, L., Santagata, A., Zaccagnino, M. and Ferro, D.: Appl. Surf. Sci. 186, 335 (2002).CrossRefGoogle Scholar
13Zhigilei, L.V.: Appl. Phys. A. 76, 339 (2003).CrossRefGoogle Scholar
14Zhang, X., Li, G.L., Xing, X.P., Zhao, X., Tang, Z.C. and Gao, Z.: Rapid Commun. Mass Spectrom. 15, 2399 (2001).CrossRefGoogle Scholar
15Santagata, A., Marotta, V., Alessio, L.D., Tehgil, R., Ferro, D. and De Maria, G.: Appl. Surf. Sci. 109/110, 376 (1997).CrossRefGoogle Scholar