MRS Proceedings

Articles

Influence of the Shape and Size of ahe Laser Spot on the Spatial Distribution of the Plasma Plume

1995 MRS Fall Meeting.

A. Melea1, A. Giardini Guidonta1, R. Kellya2, A. Miotelloa2 and S. Orlandoa3

a1 Dipartimento di Chimica, Universita’ di Roma “La Sapienza”, Piazzale Aldo Moro 5, 00185 Rome, Italy

a2 Dipartimento di Fisica, Universita’ di Trento, Povo (TN), Italy

a3 Istituto Materiali Speciali - C.N.R., Tito Scalo (PZ), Italy

Abstract

Pulsed laser deposition may be accomplished by irradiating a target with a high intensity laser pulse. The flux of particles moving from the target to the substrate obeys gas-dynamic laws when the density of the emitted particles exceeds ∼1 monolayer/(10 ns). The angular distribution of the plume, which depends on various factors, will strongly affect the deposit characteristics. It has been found that an intensified CCD camera can be successfully used to analyze laterally in two orthogonal directions the profile of the expanding plume. A marked influence of laser spot dimension and shape on plume dynamics is observed for laser ablation of a number of materials such as metals, semiconductors and high Tc superconductors.

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