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Combinatorial Laser Processing Of Dielectric/Ferroelectric Thin and Thick Films

Published online by Cambridge University Press:  11 February 2011

R. N. Das ,
C. Lew ,
I. Zergioti ,
M. O. Thompson  and
E. P. Giannelis
R. N. Das
Affiliation:
Cornell University, Department of Materials Science and Engineering, Ithaca, NY
C. Lew
Affiliation:
Cornell University, Department of Materials Science and Engineering, Ithaca, NY
I. Zergioti
Affiliation:
Foundation for Research and Technology - Hellas, Institute of Electronic Structure and Laser, Crete, Greece
M. O. Thompson
Affiliation:
Cornell University, Department of Materials Science and Engineering, Ithaca, NY
E. P. Giannelis
Affiliation:
Cornell University, Department of Materials Science and Engineering, Ithaca, NY
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Abstract

A library of different crystalline sol-gel thin films with a composition of BaxTiyOz (where x = 1,2; y = 1,2,9 and z = 3, 7, 20) has been generated using variable multi-step laser and thermal annealing. Point by point X-ray diffraction characterization revealed the presence of high dielectric (BaTiO3) and low dielectric (Ba2Ti2O7 and Ba2Ti9O20) phases. Appropriate laser and thermal annealing controlled crystallinity, phase content, morphology and dielectric property of libraries. We have extended the process to BaTiO3 based thick-films and investigated the surface morphology of laser-annealed films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 748: Symposium U – Ferroelectric Thin Films XI , 2002 , U12.18
Copyright
Copyright © Materials Research Society 2003

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References

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