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The R8–BC8 phases and crystal growth in monocrystalline silicon under microindentation with a spherical indenter

Published online by Cambridge University Press:  03 March 2011

I. Zarudi ,
L.C. Zhang ,
J. Zou  and
T. Vodenitcharova
I. Zarudi
Affiliation:
School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, NSW 2006, Australia
L.C. Zhang*
Affiliation:
School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, NSW 2006, Australia
J. Zou
Affiliation:
Division of Materials and Centre for Microscopy and Microanalysis, The University of Queensland, QLD 4047, and Australian Key Centre for Microscopy and Microanalysis, and Electron Microscope Unit, The University of Sydney, NSW 2006, Australia
T. Vodenitcharova
Affiliation:
School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, NSW 2006, Australia
*
a)Address all correspondence to this author. e-mail: zhang@aeromech.usyd.edu.au
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Abstract

The morphology and distribution of high-pressure metastable phases BC8 and R8, formed in monocrystalline silicon under microindentation, were identified and assessed using transmission electron microscopy nanodiffraction analysis. It was discovered that the crystal growth inside the transformation zone was stress-dependent with large crystals in its central region. The crystal size could also be increased using higher maximum indentation loads. The BC8 and R8 phases distributed unevenly across the transformation zone, with BC8 crystals mainly in the center of the zone and smaller R8 fragments in the peripheral regions. Such phase distribution was in agreement with the theoretical residual stress analysis.

Keywords

SiliconMicroindentationHigh-pressure phases
Type
Articles
Information
Journal of Materials Research , Volume 19 , Issue 1 , January 2004 , pp. 332 - 337
Copyright
Copyright © Materials Research Society 2004

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