MRS Proceedings

Table of Contents - Volume  784  - Symposium C – Ferroelectric Thin Films XII  

Editors : H. Funakubo, S. Hoffmann-Eifert, V. Joshi, A.I. Kingon, I. Koutsaroff


Growth and study of BaZrO3 thin films by pulsed excimer laser ablation

2003 MRS Fall Meeting.

V. Rajasekarakumara1, P. Victora1, R. Ranjitha1, S. Sahaa2, S. Rajagopalana3, A. K. Tyagia3 and S. B. Krupanidhia1

a1 Materials Research Center, Indian Institute of Science, Bangalore- 560 012, India.

a2 Argonne National Laboratory, Argonne, IL, USA.

a3 Materials Science Division, IGCAR, Kalpakkam, India.


Thin films of BaZrO3 (BZ) were grown using a pulsed laser deposition technique on platinum coated silicon substrates. Films showed a polycrystalline perovskite structure upon different annealing procedures of in-situ and ex-situ crystallization. The composition analyses were done using Energy dispersive X-ray analysis (EDAX) and Secondary ion mass spectrometry (SIMS). The SIMS analysis revealed that the ZrO2 formation at the right interface of substrate and the film leads the degradation of the device on the electrical properties in the case of ex-situ crystallized films. But the in-situ films exhibited no interfacial formation. The dielectric properties have been studied for the different temperatures in the frequency regime of 40 Hz to 100kHz. The response of the film to external ac stimuli was studied at different temperatures, and it showed that ac conductivity values in the limiting case are correspond to oxygen vacancy motion. The electrical modulus is fitted to a stretched exponential function and the results clearly indicate the presence of the non-Debye type of dielectric relaxation in these materials.