a1 Center of Super-Diamond and Advanced Films and Department of Physics and Materials Science, City University of Hong Kong, Hong Kong, People's Republic of China
The microstructures of β-SiC nanorods synthesized by hot-filament chemical vapor deposition were studied in detail by high-resolution electron microscopy. Two distinct types of nanorods were identified. The longer nanorods (lengths > 0.1 mm) contained globules at their tips and a relatively low density of stacking faults perpendicular to their  growth direction. It was also observed that SiC nanorods that grew along  direction contained no planar defects. Meanwhile, Ni was found to be an effective catalyst for SiC nanorod growth. The short nanorods (lengths < 50 nm), which contained no globules at their ends, can grow along , , or  direction. The growth of these nanorods was interpreted by a two-dimensional vapor–solid mechanism.
(Received September 20 1999)
(Accepted June 28 2000)
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