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Structural and Mechanical Properties of TiC/Ti and TiC/B4C Multilayers Deposited by Pulsed Laser Deposition

Published online by Cambridge University Press:  31 January 2011

A. R. Phani
Affiliation:
Mechanical Engineering Department, University of New Hampshire, Durham, New Hampshire 03824
J. E. Krzanowski*
Affiliation:
Mechanical Engineering Department, University of New Hampshire, Durham, New Hampshire 03824
J. J. Nainaparampil
Affiliation:
AFRL/MBLT, Wright-Patterson Air Force Base, Ohio 45433
*
a)Address all correspondence to this author. e-mail: jamesk@cisunix.unh.edu
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Abstract

Multilayers of TiC/Ti and TiC/B4C have been deposited by pulsed laser deposition. Ti, B4C, and TiC targets were used to deposit multilayer films onto 440C steel and silicon substrates at 40 °C. The structural, compositional, and mechanical properties of the multilayers were examined by x-ray diffraction, x-ray photoelectron spectroscopy, transmission electron microscopy, and nanoindentation techniques. Tribological properties were also evaluated using a pin-on-disc friction and wear test. The TiC/Ti films were found to have a crystalline structure, and both (200)TiC/(100)Ti and (111)TiC/(101)Ti orientation relationships were found in these films. In the TiC/B4C films, only the sample with the largest bilayer thickness (25 nm) had significant crystallinity and only the TiC layer was crystalline. X-ray photoelectron spectroscopy depth profiles confirmed the presence of composition modulations in these films. Nanoindentation tests of the TiC/Ti multilayers showed hardness levels exceeding that predicted by the rule-of-mixtures. The TiC/B4C multilayers showed increasing hardness with decreasing bilayer thickness but reached only 22 GPa. The pin-on-disc tests gave friction values ranging from 0.3 to 0.9 for both sets of films. These results were correlated with the degree of crystallinity and grain structure of the films.

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Articles
Copyright
Copyright © Materials Research Society 2002

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References

1.Tench, D.M. and White, J.Y., Metall. Trans. A 15A, 2039 (1984).Google Scholar
2.Bunshah, R.F., Nimmagadda, R., Doerr, H.J., Movchan, B.A., Grechanuk, N.I., and Dabizha, E.V., Thin Solid Films 72, 261 (1980).Google Scholar
3.Cammarata, R.C., Schlesinger, T.E., Kim, C., Qadri, S.E., and Edelstein, A.S., Appl. Phys. Lett. 56, 1862 (1990).Google Scholar
4.Lehoczky, S.L., J. Appl. Phys. 49, 5479 (1978).CrossRefGoogle Scholar
5.Krzanowski, J.E. and Duggan, P., in Thin Films: Stresses and Mechanical Properties V, edited by Baker, S.P., Børgesen, P., Townsend, P.H., Ross, C.A., and Volkert, C.A. (Mater. Res. Soc. Symp. Proc. 356, Pittsburgh, PA, 1995), p. 391.Google Scholar
6.Yashar, P., Barnett, S.A., Rechner, J., and Sproul, W.D., J. Vac. Sci. Tech, A 16, 2913 (1998).Google Scholar
7.Helmerson, U., Todorova, S., Barnett, S.A., Sundgren, J.E., Markett, L.C., and Greene, J.E., J. Appl. Phys. 62, 481 (1987).CrossRefGoogle Scholar
8.Shinn, M., Hultman, L., and Barnett, S.A., J. Mater. Res 7, 901 (1992).Google Scholar
9.Kusano, E., Kitagawa, M., Nanto, H., and Kinbara, A., J. Vac. Sci. Technol., A 16, 1272 (1998).Google Scholar
10.Wang, X., Kolitsch, A., and Mo¨ller, W., Appl. Phys. Lett. 71, 1951 (1997).Google Scholar
11.Krzanowski, J.E., in Thin Films: Stress and Mechanical Properties III, edited by Nix, W.D., Brauman, J.C., Arzt, E., and Freund, L.B. (Mater. Res. Soc. Symp. Proc. 239, Pittsburgh, PA, 1992), p. 509.Google Scholar
12.Krzanowski, J.E., Scr. Met. Mater. 25, 1465 (1991).Google Scholar
13.Chu, X. and Barnett, S.A., J. Appl. Phys. 77, 4403 (1995).Google Scholar
14.Lui, C.H., Li, W-Z., and Li, H-D., J. Mater. Res. 11, 2231 (1996).Google Scholar
15.Obbard, R. and Gross, T., MRS Proceedings, Fall, Boston, MA (2001, unpublished).Google Scholar
16.Phani, A.R. and Krzanowski, J.E., University of New Hampshire (unpublished research).Google Scholar
17.Oliver, W.C. and Pharr, G.M., J. Mater. Res. 7, 1564 (1992).Google Scholar
18.Sundgren, J-E., Johansson, B-O., and Karlsson, S-E., Thin Solid Films 105, 353 (1983).CrossRefGoogle Scholar
19.Zalar, A., Hofmann, S., Panjan, P., and Krasevec, V., Thin Solid Films 220, 191 (1992).Google Scholar
20.Krzanowski, J.E. and Leuchtner, R.E., J. Am. Ceram. Soc. 80, 1277 (1997).CrossRefGoogle Scholar
21.Phani, A.R., Krzanowski, J.E., and Nainaparampril, J.J., J. Vac. Sci. Technol., A 19, 2252 (2001).Google Scholar