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Ultrafast Processes for Bulk Modification of Transparent Materials

Published online by Cambridge University Press:  31 January 2011

Kazuyoshi Itoh ,
Wataru Watanabe ,
Stefan Nolte  and
Chris B. Schaffer
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Abstract

When a femtosecond laser pulse is focused inside a transparent material, the optical intensity in the focal volume can become high enough to induce permanent structural modifications such as a refractive index change or the formation of a small vacancy. Thus, one can micromachine structures inside the bulk of a transparent material in three dimensions. We review the mechanisms of and techniques for bulk modification of transparent materials using femtosecond laser pulses and discuss the fabrication of photonic and other structures in transparent materials, including waveguides, couplers, gratings, diffractive lenses, optical data storage, and microfluidic channels.

Keywords

fluidicslasermachiningoptical
Type
Research Article
Information
MRS Bulletin , Volume 31 , Issue 8: Ultrafast Lasers in Materials Research , August 2006 , pp. 620 - 625
Copyright
Copyright © Materials Research Society 2006

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References

1Stuart, B.C.Feit, M.D.Herman, S.Rubenchik, A.M.Shore, B.W. and Perry, M.D.Phys. Rev. B 53 (1996) p. 1749.CrossRefGoogle Scholar
2Lenzner, M.Krüger, J., Sartania, S.Cheng, Z.Spielmann, Ch., Mourou, G.Kautek, W. and Krausz, F.Phys. Rev. Lett. 80 (1998) p. 4076.CrossRefGoogle Scholar
3Du, D.Liu, X.Korn, G.Squier, J. and Mourou, G.Appl. Phys. Lett. 64 (1994) p. 3071.CrossRefGoogle Scholar
4Schaffer, C.B.Brodeur, A. and Mazur, E.Meas. Sci. Technol. 12 (2001) p. 1784.CrossRefGoogle Scholar
5Joglekar, A.P.Liu, H.-H., Meyhöfer, E., Mourou, G. and Hunt, A.J.Proc. Natl. Acad. Sci. USA 101 (2004) p. 5856.CrossRefGoogle Scholar
6Miura, K.Qiu, J.Inouye, H.Mitsuyu, T. and Hirao, K.Appl. Phys. Lett. 71 (1997) p. 3329.CrossRefGoogle Scholar
7Florea, C. and Winick, K.A.J. Lightwave Technol. 21 (2003) p. 246.CrossRefGoogle Scholar
8Sudrie, L.Franco, M.Prade, B. and Mysyrowicz, A.Opt. Commun. 171 (1999) p. 279.CrossRefGoogle Scholar
9Sudrie, L.Franco, M.Prade, B. and Mysyrowicz, A.Opt. Commun. 191 (2001) p. 333.CrossRefGoogle Scholar
10Glezer, E.N.Milosavljevic, M.Huang, L.Finlay, R.J.Her, T.-H., Callan, J.P. and Mazur, E.Opt. Lett. 21 (1996) p. 2023.CrossRefGoogle Scholar
11Glezer, E.N. and Mazur, E.Appl. Phys. Lett. 71 (1997) p. 882.CrossRefGoogle Scholar
12Schaffer, C.B.Jamison, A.O. and Mazur, E.Appl. Phys. Lett. 84 (2004) p. 1441.CrossRefGoogle Scholar
13Chan, J.W.Huser, T.Risbud, S. and Krol, D.M.Opt. Lett. 26 (2001) p. 1726.CrossRefGoogle Scholar
14Chan, J.W.Huser, T.R.Risbud, S.H.Hayden, J.S. and Krol, D.M.Appl. Phys. Lett. 82 (2003) p. 2371.CrossRefGoogle Scholar
15Chan, J.W.Huser, T.R.Risbud, S.H. and Krol, D.M.Appl. Phys. A 76 (2003) p. 367.CrossRefGoogle Scholar
16Bruckner, R.J. Non-Cryst. Solids 5 (1970) p. 123.CrossRefGoogle Scholar
17Bruckner, R.J. Non-Cryst. Solids 6 (1971) p. 177.CrossRefGoogle Scholar
18Kawamura, K.Sarukura, N.Hirano, M. and Hosono, H.Appl. Phys. Lett. 78 (2001) p. 1038.CrossRefGoogle Scholar
19Davis, K.M.Miura, K.Sugimoto, N. and Hirao, K.Opt. Lett. 21 (1996) p. 1829.Google Scholar
20Homoelle, D.Wielandy, W.Gaeta, A.L.Borrelli, E.F. and Smith, C.Opt. Lett. 24 (1999) p. 1311.CrossRefGoogle Scholar
21Will, M.Nolte, S.Chichkov, B.N. and Tünnermann, A., Appl. Opt. 41 (2002) p. 4360.CrossRefGoogle Scholar
22Shimotsuma, Y.Kazansky, P.G.Qiu, J. and Hirao, K.Phys. Rev. Lett. 91 247405 (2003).CrossRefGoogle Scholar
23Shimotsuma, Y.Hirao, K.Qiu, J. and Kazansky, P.G.Mod. Phys. Lett. B 19 (2005) p. 225.CrossRefGoogle Scholar
24Bricchi, E.Klappauf, B.G. and Kazansky, P.G.Opt. Lett. 29 (2004) p. 119.CrossRefGoogle Scholar
25Hnatovsky, C.Taylor, R.S.Rajeev, P.P.Simova, E.Bhardwaj, V.R.Rayner, D.M. and Corkum, P.B.Appl. Phys. Lett. 87 (2005) p. 14104.CrossRefGoogle Scholar
26Hnatovsky, C., Taylor, R.S.Simova, E.Bhardwaj, V.R.Rayner, D.M. and Corkum, P.B.Opt. Lett. 30 (2005) p. 1867.CrossRefGoogle Scholar
27Qiu, J.R.Miura, K. and Hirao, K.Jpn. J. Appl. Phys. Part 1 37 (1998) p. 2263.CrossRefGoogle Scholar
28Gorelik, T.Will, M.Nolte, S.Tünnermann, A., and Glatzel, U.Appl. Phys. A 76 (2003) p. 309.CrossRefGoogle Scholar
29Streltsov, A.M. and Borrelli, N.F.J. Opt. Soc. Am. B 19 (2002) p. 2469.CrossRefGoogle Scholar
30Bhardwaj, V.R.Simova, E.Corkum, P.B.Rayner, D.M.Hnatovsky, C.Taylor, R.S.Schreder, B.Kluge, M. and Zimmer, J.J. Appl. Phys. 97 083102 (2005).CrossRefGoogle Scholar
31Schaffer, C.B.Brodeur, A.Garcia, J.F. and Mazur, E.Opt. Lett. 26 (2001) p. 93.CrossRefGoogle Scholar
32Minoshima, K.Kowalevicz, A.M.Hartl, I.Ippen, E.P. and Fujimoto, J.G.Opt. Lett. 26 (2001) p. 1516.CrossRefGoogle Scholar
33Minoshima, K.Kowalevicz, A.M.Ippen, E.P. and Fujimoto, J.G.Opt. Express 10 (2002) p. 645.CrossRefGoogle Scholar
34Schaffer, C.B.Garcia, J.F. and Mazur, E.Appl. Phys. A 76 (2003) p. 351.CrossRefGoogle Scholar
35Will, M.Burghoff, J.Limpert, J.Schreiber, T.Nolte, S. and Tünermann, A., in Conference on Lasers and Electro-Optics (CLEO), edited by awchuk, A.A. (Optical Society of America, Baltimore, MD, 2003) paper No. CWI 6.Google Scholar
36Shah, L.Arai, A.Y.Eaton, S.M. and Herman, P.R.Opt. Express 13 (2005) p. 1999.CrossRefGoogle Scholar
37Borrelli, N.F.Smith, C.Allan, D.C. and Seward, T.P.J. Opt. Soc. Am. B 14 (1997) p. 1606.CrossRefGoogle Scholar
38Watanabe, W.Toma, T.Yamada, K.Nishii, J.Hayashi, K. and Itoh, K.Opt. Lett. 25 (2000) p. 1669.CrossRefGoogle Scholar
39Watanabe, W. and Itoh, K.Opt. Express 10 (2002) p. 603.CrossRefGoogle Scholar
40Yamada, K.Watanabe, W.Toma, T.Itoh, K. and Nishii, J.Opt. Lett. 26 (2001) p. 19.CrossRefGoogle Scholar
41Osellame, R.Taccheo, S.Marangoni, M.Ramponi, R.Laporta, P.Polli, D.Silvestri, S. De, and Cerullo, G.J. Opt. Soc. Am. B 20 (2003) p. 1559.CrossRefGoogle Scholar
42Cerullo, G.Osellame, R.Taccheo, S.Marangoni, M.Polli, D.Ramponi, R.Laporta, P. and Silvestri, S. De, Opt. Lett. 27 (2002) p. 1938.CrossRefGoogle Scholar
43Ams, M.Spence, D.J.Marshall, G.D. and Withford, M.J.Opt. Express 13 (2005) p. 5676.CrossRefGoogle Scholar
44Sikorski, Y.Said, A.A.Bado, P.Maynard, R.Florea, C. and Winick, K.A.Electron. Lett. 36 (2000) p. 226.CrossRefGoogle Scholar
45Osellame, R.Taccheo, S.Cerullo, G.Marangoni, M.Polli, D.Ramponi, R.Laporta, P. and Silvestri, S. De, Electron. Lett. 38 (2002) p. 964.CrossRefGoogle Scholar
46Taccheo, S.Valle, G. Della, Osellame, R.Cerullo, G.Chiodo, N.Laporta, P.Svelto, O.Killi, A.Morgner, U.Lederer, M. and Kopf, D.Opt. Lett. 29 (2004) p. 2626.CrossRefGoogle Scholar
47Osellame, R.Chiodo, N.Valle, G. Della, Taccheo, S.Ramponi, R.Cerullo, G.Killi, A.Morgner, U.Lederer, M. and Kopf, D.Opt. Lett. 29 (2004) p. 1900.CrossRefGoogle Scholar
48Gui, L.Xu, B. and Chong, T.C.IEEE Photon. Technol. Lett. 16 (2004) p. 1337.CrossRefGoogle Scholar
49Apostolopoulos, V.Laversenne, L.Colomb, T.Depeursinge, C.Salathé, R.P., Pollnau, M.Osellame, R.Cerullo, G. and Laporta, P.Appl. Phys. Lett. 85 (2004) p. 1122.CrossRefGoogle Scholar
50Nejadmalayeri, A.H.Herman, P.R.Burghoff, J.Will, M.Nolte, S. and Tünnermann, A., Opt. Lett. 30 (2005) p. 964.CrossRefGoogle Scholar
51Zoubir, A.Richardson, M.Rivero, C.Schulte, A.Lopez, C.Richardson, K.Hô, N., and Valle, R.Opt. Lett. 29 (2004) p. 748.CrossRefGoogle Scholar
52Sowa, S.Watanabe, W.Nishii, J. and Itoh, K.Opt. Express 14 (2006) p. 291.CrossRefGoogle Scholar
53Homoelle, D.Wielandy, S.Gaeta, A.L.Borrelli, N.F. and Smith, C.Opt. Lett. 24 (1999) p. 1311.CrossRefGoogle Scholar
54Nolte, S.Will, M.Burghoff, J. and Tünnermann, A., J. Mod. Opt. 51 (2004) p. 2533.CrossRefGoogle Scholar
55Nasu, Y.Kohtoku, M. and Hibino, Y.Opt. Lett. 30 (2005) p. 723.CrossRefGoogle Scholar
56Streltsov, A.M. and Borrelli, N.F.Opt. Lett. 26 (2001) p. 42.CrossRefGoogle Scholar
57Watanabe, W.Asano, T.Yamada, K.Itoh, K. and Nishii, J.Opt. Lett. 28 (2003) p. 2491.CrossRefGoogle Scholar
58Nolte, S.Will, M.Burghoff, J. and Tünnermann, A., Appl. Phys. A 77 (2003) p. 109.CrossRefGoogle Scholar
59Kowalevicz, A.M.Sharma, V.Ippen, E.P.Fujimoto, J.G. and Minoshima, K.Opt. Lett. 30 (2005) p. 1060.CrossRefGoogle Scholar
60Pertsch, T.Peschel, U.Lederer, F.Burghoff, J.Will, M.Nolte, S. and Tünnermann, A., Opt. Lett. 29 (2004) p. 468.CrossRefGoogle Scholar
61Szameit, A.Blömer, D., Burghoff, J.Pertsch, T.Nolte, S. and Tünnermann, A., Appl. Phys. B 82 (2006) p. 507.CrossRefGoogle Scholar
62Yamada, K.Watanabe, W.Nishii, J. and Itoh, K.Jpn. J. Appl. Phys., Part 1 42 (2003) p. 6916.CrossRefGoogle Scholar
63Kawamura, K.Ogawa, T.Sarukura, N.Hirano, M. and Hosono, H.Appl. Phys. B 71 (2000) p. 119.CrossRefGoogle Scholar
64Li, Y.Watanabe, W.Itoh, K. and Sun, X.Appl. Phys. Lett. 81 (2002) p. 1952.CrossRefGoogle Scholar
65Kawamura, K.Ogawa, T.Sarukura, N.Hirano, M. and Hosono, H.Appl. Phys. B 71 (2000) p. 119.CrossRefGoogle Scholar
66Li, Y.Watanabe, W.Yamada, K.Shinagawa, T.Itoh, K.Nishii, J. and Jiang, Y.Appl. Phys. Lett. 80 (2002) p. 1508.CrossRefGoogle Scholar
67Li, Y.Yamada, K.Ishizuka, T.Watanabe, W.Itoh, K. and Zhou, Z.Opt. Express 10 (2002) p. 1173.CrossRefGoogle Scholar
68Watanabe, W.Kuroda, D.Itoh, K. and Nishii, J.Opt. Express 10 (2002) p. 978.CrossRefGoogle Scholar
69Yamada, K.Watanabe, W.Li, Y.Itoh, K. and Nishii, J.Opt. Lett. 29 (2004) p. 1846.CrossRefGoogle Scholar
70Marcinkevièius, A., Juodkazis, S.Watanabe, M.Miwa, M.Matsuo, S.Misawa, H. and Nishii, J.Opt. Lett. 26 (2001) p. 277.CrossRefGoogle Scholar
71Cheng, Y.Sugioka, K.Midorikawa, K.Masuda, M.Toyoda, K.Kawachi, M. and Shihoyama, K.Opt. Lett. 28 (2003) p. 55.CrossRefGoogle Scholar
72Masuda, M.Sugioka, K.Cheng, Y.Aoki, N.Kawachi, M.Shihoyama, K.Toyoda, K.Helvajian, H. and Midorikawa, K.Appl. Phys. A 76 (2003) p. 857.CrossRefGoogle Scholar
73Bellouard, Y.Said, A.Dugan, M. and Bado, P.Opt. Express 12 (2004) p. 2120.CrossRefGoogle Scholar
74Sugioka, K.Cheng, Y. and Midorikawa, K.J. Photopolym. Sci. Technol. 17 (2004) p. 397.CrossRefGoogle Scholar
75Li, Y.Itoh, K.Watanabe, W.Yamada, K.Kuroda, D.Nishii, J. and Jiang, Y.Opt. Lett. 26 (2001) p. 1912.CrossRefGoogle Scholar
76Iga, Y.Ishizuka, T.Watanabe, W.Li, Y.Nishii, J. and Itoh, K.Jpn. J. Appl. Phys. Part 1 43 (2004) p. 4207.CrossRefGoogle Scholar
77Ke, K.Hasselbrink, E.F. Jr, and Hunt, A.J.Anal. Chem. 77 (2005) p. 5083.CrossRefGoogle Scholar
78Kim, T.N.Campbell, K.Groisman, A.Kleinfeld, D. and Schaffer, C.B.Appl. Phys. Lett. 86 201106 (2005).CrossRefGoogle Scholar
79Eaton, S.M.Zhang, H.Herman, P.R.Yoshino, F.Shah, L.Bovatsek, J. and Arai, A.Y.Opt. Express 13 (2005) p. 4708.CrossRefGoogle Scholar
80Zoubir, A.Richardson, M.Canioni, L.Brocas, A. and Sarger, L.J. Opt. Soc. Am. B 22 (2005) p. 2138.CrossRefGoogle Scholar
81Szameit, A.Blömer, D., Burghoff, J.Schreiber, T.Pertsch, T.Nolte, S.Tünnermann, A., and Lederer, F.Opt. Express 13 (2005) p. 10552.CrossRefGoogle Scholar
82Christodoulides, D.N. and Eugenieva, E.D.Phys. Rev. Lett. 87 233901 (2001).CrossRefGoogle Scholar
83Eugenieva, E.D.Efremidis, N.K. and Christodoulides, D.N.Opt. Lett. 26 (2001) p. 1978.CrossRefGoogle Scholar