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Tunability of Carbon NanoTubes Resistance Deposited by Inkjet Printing at Low Temperature

Published online by Cambridge University Press:  01 February 2011

Sebastien Pacchini
Affiliation:
pacchini@laas.fr, LAAS-CNRS, MINC, Toulouse, France
Véronique Conédéra
Affiliation:
conedera@laas.fr, LAAS-CNRS, TEAM, Toulouse, France
Fabien Mesnilgrente
Affiliation:
fabien.mesnilgrente@laas.fr, LAAS-CNRS, TEAM, Toulouse, France
Norbert Fabre
Affiliation:
nfabre@laas.fr, LAAS-CNRS, TEAM, Toulouse, France
Emmanuel Flahaut
Affiliation:
e.flahaut@chimie.ups-tlse.fr, Université de Toulouse, UPS, INP - Institut Carnot Cirimat, Toulouse, France
Fabio Coccetti
Affiliation:
coccetti@laas.fr, LAAS-CNRS, MINC, Toulouse, France
Mircea Dragoman
Affiliation:
mircea.dragoman@imt.ro, Univ. Bucharest, Bucharest, Romania
Robert Plana
Affiliation:
plana@laas.fr, LAAS-CNRS, MINC, Toulouse, France
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Abstract

A deposition method based on inkjet printing technology and conductive double-wall carbon nanotubes (DWNT) suspension is, hereby, presented. The approach exploits the selective transfer capabilities offered by the inkjet printing process and the excellent conductive characteristics of the available DWNTs, in order to realize microelectronic interconnects of arbitrary patter and given electrical properties. The DWNTs are prepared by CCVD process, oxidized and dispersed in ethylene-glycol (EG) and in water solution. The DWNTs lines are fabricated on tests structures and then characterized through impedance and current-voltage measurements. 400 μm long and 90 μm wide transmission lines have been printed by varying the number of overwrites for given DWNT density. The results confirm that the DC resistance of DWNTs lines can be changed according to the number of overwrites and that the lines preserve ohmic characteristics up to 100 MHz.

Type
Research Article
Copyright
Copyright © Materials Research Society 2010

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