Journal of Materials Research


Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition

Y. Zhonga1, Y.C. Shina1, C.M. Kima1, B.G. Leea1, E.H. Kima1, Y.J. Parka2, K.M.A. Sobahana2, C.K. Hwangboa2, Y.P. Leea3 and T.G. Kima4 c1

a1 School of Electrical Engineering, Korea University, Seoul 136-701, Korea

a2 Department of Physics, Inha University, Incheon 402-751, Korea

a3 Quantum Photonic Science Research Center, Department of Physics, Hanyang University, Seoul 133-791, Korea

a4 School of Electrical Engineering, Korea University, Seoul 136-701, Korea


The optical and electrical properties of “tilted” and “spiral” indium tin oxide (ITO) thin films are reported. The influence of the flux incident angle on the optical and electrical properties is investigated. When the flux incident angle is increased, both the refractive index and extinction coefficient of the film are decreased, but the resistivity is increased. Thus, the physical properties of the film can be modified over a wide range by adjusting the flux incident angle and substrate rotation scheme. It is suggested that the oblique angle deposition technique provides ITO films with more application possibilities by allowing their optical and electrical properties to be tailored.

(Received December 17 2007)

(Accepted June 11 2008)

Key Words:

  • Electrical properties;
  • Optical properties;
  • Thin film


c1 Address all correspondence to this author. e-mail: