Contributed paper

Test of precision weak-link stage systems with large travel range and subnanometre-scale resolution

D. Shu^a1 c1 and J. Maser^a1a2

^a1 Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, USA

^a2 Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL 60439, USA

Abstract

The precision ball-bearing- or roller-bearing-based stage systems provide large travel range. However, they have difficulties in meeting subnanometre resolution, high tilting stiffness and high straightness of trajectory with a single guiding system. It is always a dream to have a compact single flexure stage to cover a large travel range with very high positioning resolution. Based on an advanced structure design with the laminar overconstrained weak-link technique, we have designed and constructed a two-dimensional linear precision weak-link stage system for nanopositioning of a specimen holder for the linear multilayer Laue lenses test setup at the Advanced Photon Source Sector 26. This system provides subnanometre resolution, coupled with subnanometre metrology at a travel range of several millimetres. The two-dimensional weak-link stage system is designed with high structure stiffness using laminar overconstrained weak-link mechanisms. In this paper we present the preliminary test results of a linear precision weak-link stage system with subcentimetre travel range and subnanometre positioning resolution.

(Received June 11 2010)

(Revised October 17 2010)

(Accepted November 04 2010)

Correspondence:

^c1 Email address for correspondence: shu@aps.anl.gov