Journal of Materials Research


On the use of ion scattering to examine the role of hydrogen in the reduction of TiO2

W.E. Wallacea1 p1, Q. Zhonga1 p2, J. Genzera1, R.J. Compostoa1 and D.A. Bonnella1

a1 Department of Materials Science and Engineering, The University of Pennsylvania, Philadelphia, Pennsylvania 19104-6272


Rutherford backscattering spectrometry (RBS) was used to measure the titanium concentration profile for hydrogen-reduced, vacuum-reduced, and as-received, stoichiometric rutile. These profiles give the degree of reduction, specifically, the extent of oxygen deficiency, as a function of depth below the sample surface. Using forward-recoil spectrometry (FRES), the hydrogen-reduced rutile was found to contain more bulk and near-surface hydrogen than the as-received, stoichiometric rutile. This observation provides additional evidence for a hydrogen-diffusion model for the reduction of rutile in a hydrogen environment.

(Received November 06 1992)

(Accepted March 05 1993)


p1 Present address: National Institute of Standards and Technology, Gaithersburg, Maryland 20899.

p2 Present address: AT&T Bell Laboratories, Murray Hill, New Jersey 07974.