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Ar+ ion irradiation in oxygen environment for improving wettability of polymethylmethacrylate

Published online by Cambridge University Press:  31 January 2011

Seok-Keun Koh
Affiliation:
Ceramics Division, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul, 130–650, Korea
Won-Kook Choi
Affiliation:
Ceramics Division, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul, 130–650, Korea
Jun-Sik Cho
Affiliation:
Ceramics Division, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul, 130–650, Korea
Seok-Kyun Song
Affiliation:
Ceramics Division, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul, 130–650, Korea
Young-Man Kim
Affiliation:
Advanced Analysis Center, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul, 130–650, Korea
Hyung-Jin Jung
Affiliation:
Ceramics Division, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul, 130–650, Korea
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Abstract

Ion irradiation with various oxygen flow rates has been carried out to improve the wettability of polymethylmethacrylate (PMMA) to water and to enhance the adhesion between Al and the polymer. Ar+ ion and oxygen ion were irradiated on the polymer, and amounts of ions were changed from 5 × 1014 Ar+/cm2 to 5 × 1016 Ar+/cm2 by a broad ion beam source. Oxygen gas from 0 ml/min to 7 ml/min was flowed near the polymer surface during the ion irradiation, and the energy of ions was changed from 500 eV to 1500 eV. The wetting angle was reduced from 68° to 49° with the Ar+ ion irradiation only at 1 keV energy, to 43° with the oxygen ion irradiation, and dropped to 8° with Ar+ ion irradiation with flowing 4 ml/min oxygen gas near the polymer surface. Changes of wetting angle with oxygen gas and Ar+ ion irradiation were explained by a two-step chemical reaction among polymer matrix, energetic ions, and oxygen gas. The effects of Ar+ ion and oxygen ion irradiation were explained by considering formation of hydrophilic groups due to a reaction between irradiated polymer chain by energetic ion irradiation and blown oxygen gas, and enhanced adhesion between Al and PMMA was explained by the formation of electron acceptor groups in polymer and electron donors in metal, and by the chemical reaction in the interface between irradiated polymer surface and deposited metal.

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Articles
Copyright
Copyright © Materials Research Society 1996

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References

REFERENCES

1.Schalek, R., Hlavacek, M., and Grummon, D. S., in Photons and Low Energy Particles in Surface Processing, edited by Ashby, C.I.H., Brannon, J. H., and Pang, S. W. (Mater. Res. Soc. Symp. Proc. 236, Pittsburgh, PA, 1992), p. 335.Google Scholar
2.Wintersgill, M. C., Nucl. Inst. Meth. B1, 595 (1984).CrossRefGoogle Scholar
3.Forrest, S. R., Kaplan, M. L., Schmidt, P. H., Venkatesan, T., and Lovinger, A. J., Appl. Phys. Lett. 41 (8), 708 (1982).CrossRefGoogle Scholar
4.Venkatesan, T., Dynes, R. C., Wilkens, B., White, A. E., Gibson, J. M., and Hamm, R., Nucl. Inst. Meth. B1, 599 (1984).CrossRefGoogle Scholar
5.Wang, G. H., Li, X. J., Zhu, Y. Z., Liu, Q. S., Hu, N. X., Gu, X. S., and Wang, Q., Nucl. Inst. Meth. B7/8, 497 (1985).CrossRefGoogle Scholar
6.Wang, G. H., Pan, G. Q., and Dou, L., Nucl. Inst. Meth. B27, 410 (1987).CrossRefGoogle Scholar
7.Puglisi, O., Licciardello, A., Calcagno, L., and Foti, G., Nucl. Inst. Meth. B19/20, 865 (1987).CrossRefGoogle Scholar
8.Iacona, F., Galilli, M., Marletta, G., Puglisi, O., and Pignataro, S., J. Mater. Res. 6, 861 (1991).CrossRefGoogle Scholar
9.Baglin, J. E. E., Schrott, A. G., Thompson, R. D., Tu, K. N., and Segmüller, A., Nucl. Inst. Meth. B19/20, 782 (1987).CrossRefGoogle Scholar
10.Gerenser, L. J., J. Vac. Sci. Technol. A6 (5), 2897 (1989).Google Scholar
11.Ho, P. S., Hahn, P.O., Rubloff, G.W., LeGouse, F.K., and Silverman, B. D., J. Vac. Sci. Technol. A3 (3), 739 (1985).CrossRefGoogle Scholar
12.Koh, S. K., Pae, K. D., and Caracciolo, R., Polym. Eng. Sci. 32 (8), 559 (1992).CrossRefGoogle Scholar
13.Baglin, J. E. E., Nucl. Inst. Meth. B65, 119 (1992).CrossRefGoogle Scholar
14.Koh, S. K., Choi, W. K., Song, S. K., Jung, H-J., and Han, S. N., J. Kor. Appl. Phys. 8 (2), 193 (1995).Google Scholar
15.Koh, S. K., Song, S. K., Choi, W. K., Jung, H-J., and Han, S. N., J. Mater. Res. 10, 2390 (1995).CrossRefGoogle Scholar
16.Livi, R. P., Nucl. Inst. Meth. B10/11, 545 (1985).CrossRefGoogle Scholar
17.Jacobson, S., Johnson, B., and Sundqvist, B., Thin Solid Films 107, 89 (1983).CrossRefGoogle Scholar
18.Wie, C. R., Shi, C. R., Mendenshall, M. H., Livi, R. P., Vreeland, T. Jr, and Tombrello, T. A., Nucl. Inst. Meth. B9, 20 (1985).CrossRefGoogle Scholar
19.Tombrello, T. A., Nucl. Inst. Meth. 218, 679 (1983).CrossRefGoogle Scholar
20.Griffith, J. E., Qiu, Y., and Tombrello, T. A., Nucl. Inst. Meth. 198, 607 (1982).CrossRefGoogle Scholar
21.Chou, N. J., Dong, D. W., Kim, J., and Liu, A. C., J. Electrochem. Soc., Solid State Sci. Technol. 131 (10), 2335 (1984).CrossRefGoogle Scholar
22.Flitsch, R. and Shin, D. Y., J. Vac. Sci. Technol. A8 (3), 2376 (1990).CrossRefGoogle Scholar
23.Mitchell, I. V., Williams, J.S., Smith, P., and Elliman, R. G., Appl. Phys. Lett. 44 (2), 193 (1984).CrossRefGoogle Scholar
24.Kellock, A. J., Nyberg, G. L., and Williams, J.S., Vacuum 35 (12), 625 (1985).CrossRefGoogle Scholar
25.Suzuki, Y., Kusakabe, M., Iwaki, M., and Suzuki, M., Nucl. Inst. Meth. B32, 120 (1988).CrossRefGoogle Scholar
26.Torrisi, L., Calcagno, L., and Foti, A. M., Nucl. Inst. Meth. B32, 142 (1988).CrossRefGoogle Scholar
27.Briggs, D., Rance, D. G., Kendall, C. R., and Blythe, A. R., Polym. 21, 895 (1980).CrossRefGoogle Scholar
28.Loh, I. H., Klausner, M., Baddor, R. F., and Cohen, R. E., Polym. Eng. Sci. 27 (11), 861 (1987).CrossRefGoogle Scholar