Journal of Materials Research


OMCVD of thin films from metal diketonates and triphenylbismuth

A. D. Berrya1, R. T. Holma1, M. Fatemia1 and D. K. Gaskilla1

a1 Naval Research Laboratory, Washington, DC 20375–5000


Films containing the metals copper, yttrium, calcium, strontium, barium, and bismuth were grown by organometallic chemical vapor deposition (OMCVD). Depositions were carried out at atmospheric pressure in an oxygen-rich environment using metal beta-diketonates and triphenylbismuth. The films were characterized by Auger electron spectroscopy, Nomarski and scanning electron microscopy, and x-ray diffraction. The results show that films containing yttrium consisted of Y2O3 with a small amount of carbidic carbon, those with copper and bismuth were mixtures of oxides with no detectable carbon, and those with calcium, strontium, and barium contained carbonates. Use of a partially fluorinated barium beta-diketonate gave films of BaF2 with small amounts of BaCO3.

(Received October 30 1989)

(Accepted February 16 1990)