Microscopy and Microanalysis


Physical Sciences Symposia

Composition Modulation in High-k Hafnium Silicate Films

X Wua1, J Liua2, WN Lennarda2 and D Landheera1

a1 National Research Council Canada

a2 University of Western Ontario, Canada

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.