Microscopy and Microanalysis

Special Section—Aberration-Corrected Electron Microscopy

Information Transfer in a TEM Corrected for Spherical and Chromatic Aberration

M. Haidera1 c1, P. Hartela1, H. Müllera1, S. Uhlemanna1 and J. Zacha1

a1 Corrected Electron Optical Systems GmbH, Heidelberg, Germany

Abstract

For the transmission electron aberration-corrected microscope (TEAM) initiative of five U.S. Department of Energy laboratories in the United States, a correction system for the simultaneous compensation of the primary axial aberrations, the spherical aberration Cs, and the chromatic aberration Cc has been developed and successfully installed. The performance of the resulting Cc /Cs-corrected TEAM instrument has been investigated thoroughly. A significant improvement of the linear contrast transfer can be demonstrated. The information about the instrument one obtains using Young's fringe method is compared for uncorrected, Cs-corrected, and Cc /Cs-corrected instruments. The experimental results agree well with simulations. The conclusions might be useful to others in understanding the process of image formation in a Cc /Cs-corrected transmission electron microscope.

(Received January 13 2010)

(Accepted April 14 2010)

Correspondence:

c1 Corresponding author. E-mail: haider@ceos-gmbh.de