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Advantages of a Local Charge Compensation System for FIB/SEM Applications on Insulating Materials

Published online by Cambridge University Press:  26 July 2009

H Schulz ,
U Zeile ,
JP Stodolka  and
D Kraft
H Schulz
Affiliation:
Carl Zeiss NTS GmbH,Germany
U Zeile
Affiliation:
Carl Zeiss NTS GmbH,Germany
JP Stodolka
Affiliation:
Carl Zeiss NTS GmbH,Germany
D Kraft
Affiliation:
Carl Zeiss NTS GmbH,Germany

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 332 - 333
Copyright
Copyright © Microscopy Society of America 2009