Microscopy and Microanalysis

Instrumentation and Techniques

Development of a Micro Mass Spectrometer: Analysis of Particle Behavior in MEMS Ion Lens Systems

Z Russella1, PE Russella1, J Glassa2, C Parkera2, B Stonera3, K Gilchrista3 and J Piascika3

a1 Appalachian State University

a2 Duke University

a3 RTI International

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009