Microscopy and Microanalysis

Physical Sciences

Nanosilicon Crystallite Embedded into Amorphous Silicon Matrix: Polymorphous SiliconThin Film, Obtained by Plasma Enhanced Chemical Vapor Deposition

A Remolina Millána1, G Santana Rodrigueza1, A Poncea2, M Monroya1, MFG Sancheza1, JC Alonsoa1 and A Ortiza1

a1 Universidad Nacional Autónoma de México

a2 Centro de Investigación en Química Aplicada

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009