Microscopy and Microanalysis

Physical Sciences

Basic Questions Related to Electron-Induced Sputtering

R Egertona1, F Wanga2, R McLeoda1 and M Malaca2

a1 University of Alberta

a2 National Institute for Nanotechnology

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009