CJO - Abstract - Three-Dimensional Measurement of Line Edge Roughness in Copper Wires Using Electron Tomography

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  • Volume 15
  • Issue 03 - Jun 2009
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    Three-Dimensional Measurement of Line Edge Roughness in Copper Wires Using Electron Tomography
    Peter Ercius, Lynne M. Gignac, C.-K. Hu and David A. Muller (2009).
    Microscopy and Microanalysis, Volume 15, Issue 03, June 2009 pp 244-250 http://journals.cambridge.org/action/displayAbstract?aid=5588432

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Microscopy and Microanalysis (2009), 15 : 244-250 Cambridge University Press
doi:10.1017/S143192760909028X (About doi)
Published online by Cambridge University Press 22 May 2009
 
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