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Instrumentation Developments in Atom Probe Tomography: Applications in Semiconductor Research

Published online by Cambridge University Press:  31 July 2006

J Bunton
Affiliation:
Imago Scientific Instruments
D Lenz
Affiliation:
Imago Scientific Instruments
J Olson
Affiliation:
Imago Scientific Instruments
K Thompson
Affiliation:
Imago Scientific Instruments
R Ulfig
Affiliation:
Imago Scientific Instruments
D Larson
Affiliation:
Imago Scientific Instruments
T Kelly
Affiliation:
Imago Scientific Instruments

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Copyright
© 2006 Microscopy Society of America