Microscopy and Microanalysis



Abstract


Advances in Instrumentation and Techniques - Atom Probe Field Ion Microscopy

Instrumentation Developments in Atom Probe Tomography: Applications in Semiconductor Research


Bunton a1, Lenz a1, Olson a1, Thompson a1, Ulfig a1, Larson a1 and Kelly a1
a1 Imago Scientific Instruments

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006