Microscopy and Microanalysis



Abstract


Advances in Instrumentation and Techniques - FIB and FIB/SEM: Applications and techniques for Physical and Biological Sciences

Reducing FIB Damage Using Low Energy Ions


LA Giannuzzi a1
a1 FEI Company

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006